Prof. Zebin Ren Profile

Prof. Zebin Ren

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Proceedings Article | 24 November 2021 Paper

Numerical analysis of optical mirror jet-flow purging characteristics

Yunqiang Sun, Zebin Ren, Dachuan Xu, Jinlei Lv, Zhilong Huang, Qin Liu

Proceedings Volume 12060, 120600S (2021) https://doi.org/10.1117/12.2606028

KEYWORDS: Mirrors, Particles, Solids, Optical components, Numerical simulations, Fluid dynamics

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Efficient cleaning of pollutants on the optical lens surface is a very important and urgent research topic in the field of laser processing. Therefore, based on the free jet theory of fluid dynamics, the flow field characteristics of the optical system lens are theoretically analyzed and numerically simulated, and the flow field distribution of the lens surface and far field is given. And then, combined with the existing solid particle pollutants adhesion type, influence law and calculation model, the adhesion force of solid particles with different diameters is calculated quantitatively. According to the gas dynamic pressure distribution on the surface of optical elements, the effectiveness of solid particle blowing on the surface of optical elements is analyzed and evaluated. Finally, according to the secondary dust phenomenon of mirror free jet purging, the jet outlet size, downstream collection port size and jet velocity that affect the flow field distribution characteristics of the lens surface are optimized. Finally, a self-priming mirror jet purging structure without backflow is given, which effectively eliminates the secondary dust phenomenon caused by mirror purging.

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