Ron Taylor
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10143, 101431T (2017) https://doi.org/10.1117/12.2258393
KEYWORDS: Reticles, Extreme ultraviolet lithography, Contamination, Atmospheric particles, Extreme ultraviolet, Air contamination, Carbon, Reflectivity, Optical lithography, Pellicles, Ions, Ruthenium

Proceedings Article | 25 October 2016 Paper
Ron Taylor, Jack Downey, Jeffrey Wood, Yen-Hung Lin, Bharathi Bugata, Dongsheng Fan, Carl Hess, Mark Wylie
Proceedings Volume 9985, 99850L (2016) https://doi.org/10.1117/12.2241129
KEYWORDS: Reticles, Inspection, Inspection equipment, Factory automation, Manufacturing, High volume manufacturing, Control systems, Image processing, Semiconducting wafers, Roads

Proceedings Article | 8 October 2014 Paper
Proceedings Volume 9235, 92351I (2014) https://doi.org/10.1117/12.2068466
KEYWORDS: Inspection, Defect detection, Photomasks, Reticles, Particles, Air contamination, Optical proximity correction, Contamination, SRAF, Image analysis

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