Dr. Rossana Cambie Profile

Dr. Rossana Cambie

at Lawrence Berkeley National Lab

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 28 September 2011 Paper

Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates

D. Voronov, E. Anderson, R. Cambie, E. Gullikson, F. Salmassi, T. Warwick, V. Yashchuk, H. Padmore

Proceedings Volume 8139, 81390B (2011) https://doi.org/10.1117/12.893774

KEYWORDS: Multilayers, Diffusion, Silicon, Diffraction gratings, Semiconducting wafers, Coating, X-rays, Atomic force microscopy, X-ray diffraction, Solids

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SPIE Journal Paper | 1 September 2011 Open Access

Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes

Valeriy Yashchuk, Samuel Barber, Wayne McKinney, Dmitriy Voronov, Erik Anderson, Nathalie Bouet, Raymond Conley, Rossana Cambie, Peter Takacs

OE, Vol. 50, Issue 09, 093604, (September 2011) https://doi.org/10.1117/12.10.1117/1.3622485

KEYWORDS: Modulation transfer functions, Calibration, Transmission electron microscopy, Scanning electron microscopy, Electron microscopes, Binary data, Interferometers, Profilometers, Spatial frequencies, Microscopes

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Proceedings Article | 2 September 2010 Paper

Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range

Valeriy Yashchuk, Erik Anderson, Samuel Barber, Nathalie Bouet, Rossana Cambie, Raymond Conley, Wayne McKinney, Peter Takacs, Dmitriy Voronov

Proceedings Volume 7801, 78010B (2010) https://doi.org/10.1117/12.860049

KEYWORDS: Modulation transfer functions, Transmission electron microscopy, Scanning electron microscopy, Calibration, Binary data, Interferometers, Electron microscopes, Silicon, Spatial frequencies, Interferometry

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Proceedings Article | 27 August 2010 Paper

High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments

Dmitriy Voronov, Minseung Ahn, Eric Anderson, Rossana Cambie, Chih-Hao Chang, Leonid Goray, Eric Gullikson, Ralf Heilmann, Farhad Salmassi, Mark Schattenburg, Tony Warwick, Valeriy Yashchuk, Howard Padmore

Proceedings Volume 7802, 780207 (2010) https://doi.org/10.1117/12.861287

KEYWORDS: Diffraction gratings, Multilayers, Silicon, Diffraction, Transmission electron microscopy, Etching, Chemical species, Diffusion, Extreme ultraviolet, X-rays

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SPIE Journal Paper | 1 May 2010

Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes

Samuel Barber, Erik Anderson, Rossana Cambie, Stefano Marchesini, Wayne McKinney, Peter Takacs, Dmitry Vorornov, Valeriy Yashchuk

OE, Vol. 49, Issue 05, 053606, (May 2010) https://doi.org/10.1117/12.10.1117/1.3431659

KEYWORDS: Modulation transfer functions, Calibration, Spatial frequencies, Binary data, Profilometers, Etching, Microscopes, Scanning probe microscopy, Interferometry, Silicon

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Proceedings Article | 9 September 2009 Paper

5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range

Dmitriy Voronov, Erik Anderson, Rossana Cambie, Farhad Salmassi, Eric Gullikson, Valeriy Yashchuk, Howard Padmore, Minseung Ahn, Chih-Hao Chang, Ralf Heilmann, Mark Schattenburg

Proceedings Volume 7448, 74480J (2009) https://doi.org/10.1117/12.826921

KEYWORDS: Diffraction gratings, Multilayers, Etching, Silicon, Diffraction, Semiconducting wafers, Scanning probe microscopy, Extreme ultraviolet, Anisotropic etching, X-rays

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Proceedings Article | 4 September 2009 Paper

Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

Samuel Barber, Paul Soldate, Erik Anderson, Rossana Cambie, Stefano Marchesini, Wayne McKinney, Peter Takacs, Dmitriy Voronov, Valeriy Yashchuk

Proceedings Volume 7448, 744803 (2009) https://doi.org/10.1117/12.825389

KEYWORDS: Modulation transfer functions, Spatial frequencies, Calibration, Scanning probe microscopy, Binary data, Profilometers, Etching, Silicon, Sensors, Microscopes

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Proceedings Article | 3 September 2008 Paper

Fabrication and characterization of a new high density Sc/Si multilayer sliced grating

Dmitriy Voronov, Rossana Cambie, Eric Gullikson, Valeriy Yashchuk, Howard Padmore, Yuri Pershin, Alexander Ponomarenko, Valeriy Kondratenko

Proceedings Volume 7077, 707708 (2008) https://doi.org/10.1117/12.795377

KEYWORDS: Multilayers, Diffraction gratings, Etching, Diffraction, Prototyping, Silicon, X-rays, Semiconducting wafers, Coating, Polishing

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Proceedings Article | 20 September 2007 Paper

Development of an ultrahigh-resolution diffraction grating for soft x-rays

Dmitriy Voronov, Rossana Cambie, Ruslan Feshchenko, Eric Gullikson, Howard Padmore, Alexander Vinogradov, Valeriy Yashchuk

Proceedings Volume 6705, 67050E (2007) https://doi.org/10.1117/12.732658

KEYWORDS: Diffraction gratings, Diffraction, X-rays, Multilayers, Spectral resolution, X-ray diffraction, Scattering, Distortion, Reflectivity, Tolerancing

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Showing 5 of 9 publications

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