Dr. Ryan A. Mesch Profile

Dr. Ryan A. Mesch

Materials Engineer at Intel Corp

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Publications (2)

Proceedings Article | 20 March 2015 Paper

Aromatizing unzipping polyester for EUV photoresist

Kensuke Matsuzawa, Ryan Mesch, Mike Olah, Wade Wang, Scott Phillips, C. Grant Willson

Proceedings Volume 9425, 94251Q (2015) https://doi.org/10.1117/12.2085780

KEYWORDS: Polymers, Ultraviolet radiation, Extreme ultraviolet lithography, Absorption, Photoresist materials, Semiconducting wafers, Deep ultraviolet, Diffusion, Thin films, Bioalcohols

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Proceedings Article | 16 April 2011 Paper

Photobase generator enabled pitch division: a progress report

Xinyu Gu, Younjin Cho, Takanori Kawakami, Yuji Hagiwara, Brandon Rawlings, Ryan Mesch, Toshiyuki Ogata, Taeho Kim, Takehiro Seshimo, Wade Wang, Arun Sundaresan, Nicholas Turro, Roel Gronheid, James Blackwell, Robert Bristol, C. Grant Willson

Proceedings Volume 7972, 79720F (2011) https://doi.org/10.1117/12.879861

KEYWORDS: Line edge roughness, Polymers, Lithography, Diffusion, Optical lithography, Photomasks, Chemical analysis, Scanning electron microscopy, Absorbance, Chemistry

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