Dr. Ryo Shimoda Profile

Dr. Ryo Shimoda

at TASMIT Inc

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Publications (1)

Proceedings Article | 26 March 2019 Paper

E-beam inspection of single exposure EUV direct print of M2 layer of N10 node test vehicle

Sayantan Das, Ryo Shimoda, Shinji Mizutani, Sandip Halder, Kotaro Maruyama, Philippe Leray, Yuichiro Yamazaki

Proceedings Volume 10959, 109590H (2019) https://doi.org/10.1117/12.2515809

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Distortion, Logic, Metals, Extreme ultraviolet, Inspection, Semiconducting wafers

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