Mr. Ryuji Biro Profile

Ryuji Biro

at Canon Inc

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Author

Publications (2)

Proceedings Article | 12 May 2005 Paper

Improvement of the lifetime of the optical coatings under high power laser irradiations

Ryuji Biro, Tetsuzo Ito, Seiji Kuwabara, Hirotaka Fukushima, Hideo Akiba, Keisui Banno, Yasuyuki Suzuki, Minoru Otani, Kazuho Sone

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.597156

KEYWORDS: Transmittance, Coating, Optical coatings, Lithography, Laser irradiation, High power lasers, Contamination, NOx, Reflectivity, Oxygen

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Proceedings Article | 30 July 2002 Paper

Development of low-loss optical coatings for 157-nm lithography

Ryuji Biro, Kazuho Sone, Shunsuke Niisaka, Minoru Otani, Yasuyuki Suzuki, Chidane Ouchi, Tadahiko Saito, Masanobu Hasegawa, Jun Saito, Akira Tanaka, Akira Matsumoto

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474550

KEYWORDS: Optical coatings, Lithography, Neodymium, Spectroscopy, Fluorine, Vacuum ultraviolet, Lenses, Transmittance, Absorption, Reflection

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