Ms. Sabine Engelhardt Profile

Sabine Engelhardt

at Karlsruher Institut für Technologie

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 26 April 2019 Paper

M. Zakharova, S. Reich, A. Mikhaylov, V. Vlnieska, Marcus Zuber, Sabine Engelhardt, T. Baumbach, D. Kunka

Proceedings Volume 11032, 110320U (2019) https://doi.org/10.1117/12.2520723

KEYWORDS: Photomasks, Visibility, X-rays, Sensors, Gold, Photoresist materials, X-ray imaging, Phase contrast, Lithography

SPIE Journal Paper | 12 January 2017

Tobias Schröter, Frieder Koch, Pascal Meyer, Martin Baumann, Daniel Münch, Danays Kunka, Sabine Engelhardt, Marcus Zuber, Tilo Baumbach, Jürgen Mohr

JM3, Vol. 16, Issue 01, 013501, (January 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.1.013501

KEYWORDS: Photomasks, X-rays, X-ray imaging, Synchrotrons, Scanners, Visibility, Gold, Sensors, Phase shifts, Interferometers

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