CONFERENCE PROCEEDINGS
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Sang-Hyeon Lee
at SAMSUNG Electronics Co Ltd
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Publications (3)
Proceedings Article | 17 October 2008 Paper
Analysis of process margin in EUV mask repair with nano-machining
Su-Young Lee, Geun-Bae Kim, Hong-Seok Sim, Sang-Hyeon Lee, Hwa-Sung Kim, Jung-Hwan Lee, Hwan-Seok Seo, Hak-Seung Han, Seong-Sue Kim, Seong-Yong Moon, Sang-Gyun Woo, Ron Bozak, Andrew Dinsdale, Tod Robinson, David Lee, HanKu Cho
Proceedings Volume 7122, 71222I (2008) https://doi.org/10.1117/12.801415
KEYWORDS: Photomasks, Extreme ultraviolet, Error analysis, Extreme ultraviolet lithography, Scanning electron microscopy, Semiconducting wafers, Diffractive optical elements, Image processing, Critical dimension metrology, Factor analysis
Proceedings Article | 14 May 2007 Paper
Requirements of nano-machining repair system for 45-nm node
Sang-Hyeon Lee, Hwa-Sung Kim, Hong-Seok Shim, Su-Young Lee, Geun-Bae Kim, Hyuk-Joo Kwon, Sang-Gyun Woo, Han-Ku Cho
Proceedings Volume 6607, 660712 (2007) https://doi.org/10.1117/12.728951
KEYWORDS: Scanning electron microscopy, Photomasks, Diamond, Neodymium, Critical dimension metrology, Chromium, Quartz, Transmittance, Adhesives, Atomic force microscopy
Proceedings Article | 14 July 2003 Paper
Preparation of gold nanoparticle embedded graphitic carbon nanotubes and their field emission properties
Kyungkon Kim, Sang Lee, Se Yu, Jongmin Kim, Jae Choi, Yongsup Park, Jung-Il Jin
Proceedings Volume 4991, (2003) https://doi.org/10.1117/12.499262
KEYWORDS: Gold, Nanoparticles, Carbon nanotubes, Metals, Chemical vapor deposition, Polymerization, Atmospheric particles, Carbon, Composites, Particles
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