Dr. Sang Kyun Kim
Vice-President at Samsung Advanced Institute of Technology
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 20 March 2012 Paper
Kwen Woo Han, Hyun-Ji Song, Mi-Young Kim, Eun Su Park, Hui Chan Yoon, Go Eun Kim, Sang Hak Lim, Sang Kyun Kim
Proceedings Volume 8325, 83252B (2012) https://doi.org/10.1117/12.916252
KEYWORDS: Dielectrics, Silica, Semiconductors, Semiconducting wafers, Process control, Chemical vapor deposition, Polymers, Wet etching, Etching, Plasma

Proceedings Article | 1 April 2009 Paper
Sang Kyun Kim, Hyeon Mo Cho, Changsoo Woo, Sang Ran Koh, Mi-Young Kim, Hui Chan Yoon, Woojin Lee, Seung-Wook Shin, Jong Seob Kim, Tuwon Chang
Proceedings Volume 7273, 727313 (2009) https://doi.org/10.1117/12.814075
KEYWORDS: Etching, Silicon, Chromophores, Optical properties, Lithography, Resistance, Plasma, Optical lithography, Reflectivity, Oxygen

Proceedings Article | 4 December 2008 Paper
Sang Kyun Kim, Hyeon Mo Cho, Changsoo Woo, Sang Ran Koh, Mi-Young Kim, Hui Chan Yoon, Woojin Lee, Seung-Wook Shin, Jong-Seob Kim, Tuwon Chang
Proceedings Volume 7140, 71402V (2008) https://doi.org/10.1117/12.804399
KEYWORDS: Chromophores, Etching, Optical properties, Silicon, Lithography, Optical lithography, Reflectivity, Resistance, Coating, Plasma

Proceedings Article | 4 December 2008 Paper
Wen-Hao Wu, Edward Chang, Hwan-Sung Cheon, Sang Kyun Kim, Hyeon Mo Cho, Kyong-Ho Yoon, Jong Seob Kim, Tuwon Chang, Seongho Shin
Proceedings Volume 7140, 71402Q (2008) https://doi.org/10.1117/12.804695
KEYWORDS: Etching, Silicon, Scanning electron microscopy, Photoresist materials, Oxygen, Photomasks, Nanotechnology, Plasma, Optical lithography, Carbon

Proceedings Article | 26 March 2008 Paper
Sang Kyun Kim, Hyeon Mo Cho, Sang Ran Koh, Mi-young Kim, Hui Chan Yoon, Yong-jin Chung, Jong Seob Kim, Tuwon Chang
Proceedings Volume 6923, 69232Q (2008) https://doi.org/10.1117/12.773117
KEYWORDS: Silicon, Etching, Lithography, Chromophores, Resistance, Photoresist materials, Optical lithography, Chemical vapor deposition, Semiconducting wafers, Silicon carbide

Showing 5 of 13 publications
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