Mr. Sanggil Bae Profile

Sanggil Bae

Lithography Process Engineer

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Publications (3)

Proceedings Article | 27 March 2017 Paper

Study for new hardmask process scheme

Daeyoup Lee, Phillip Tatti, Richard Lee, Jack Chang, Winston Cho, Sanggil Bae

Proceedings Volume 10146, 101461L (2017) https://doi.org/10.1117/12.2258099

KEYWORDS: Optical alignment, Carbon, Etching, Optical lithography, System on a chip, Near infrared, Overlay metrology, Resistance, Lithography, Semiconducting wafers

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Proceedings Article | 4 March 2010 Paper

A novel method to reduce wafer topography effect for implant lithography process

Lei Yuan, Sanggil Bae, Yong Feng Fu, Ao Chen, Hui Peng Koh, Qun Ying Lin

Proceedings Volume 7640, 76403E (2010) https://doi.org/10.1117/12.846002

KEYWORDS: Semiconducting wafers, Lithography, Critical dimension metrology, Reflection, Photomasks, Diffraction, Bottom antireflective coatings, Wafer-level optics, Photoresist processing, Optical lithography

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Proceedings Article | 2 June 2000 Paper

Reduction of wafer-scale error between DI and FI in multilevel metallization by adjusting edge detection method

Sang-Gil Bae, Young-Keun Kim, Ki-Yeop Park, Jin-Soo Kim, Won-Kyu Lee, S.W. Lee, Dai-Hoon Lee

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386502

KEYWORDS: Semiconducting wafers, Electronic design automation, Aluminum, Overlay metrology, Metals, Edge detection, Photomasks, Optical lithography, Detection and tracking algorithms, Inspection

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