Dr. Sarath Samdurala Profile

Dr. Sarath Samdurala

at Lawrence Berkeley National Lab.

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Publications (1)

Proceedings Article | 31 October 2022 Poster

Ruthenium attenuated phase-shifting structure fabrication for contact-hole applications

Weilun Chao, Dong-Seok Nam, Sharon Oh, Sarath Samdurala, Eric Gullikson, Farhad Salmassi, Anthony Yen, Patrick Naulleau

Proceedings Volume PC12292, PC122920Y (2022) https://doi.org/10.1117/12.2645263

KEYWORDS: Extreme ultraviolet, Ruthenium, Phase shifts, Photomasks, Stochastic processes, Resolution enhancement technologies, Extreme ultraviolet lithography, Double patterning technology, Reticles, Optical lithography

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