Dr. Schang-jing Hon
at Epistar Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 February 2008 Paper
Proceedings Volume 6894, 689411 (2008) https://doi.org/10.1117/12.768595
KEYWORDS: Gallium nitride, Light emitting diodes, Sapphire, Semiconducting wafers, Chemical mechanical planarization, Resistance, Metals, Wafer bonding, Manufacturing, Polishing

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