Mr. Sean Hannon Profile

Sean Hannon

at Spansion Inc

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Author

Publications (3)

Proceedings Article | 16 November 2007 Paper

Reduction of layout complexity for shorter mask write-time

Sean Hannon, Travis Lewis, Scott Goad, Kenneth Jantzen, Jianlin Wang, Hien Vu, Emile Sahouria, Steffen Schulze

Proceedings Volume 6730, 67303K (2007) https://doi.org/10.1117/12.746986

KEYWORDS: Source mask optimization, Photomasks, Optical proximity correction, Reticles, Manufacturing, Optical alignment, Tolerancing, Lithography, Data processing, Semiconducting wafers

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Proceedings Article | 10 May 2005 Paper

Utilizing overlay target noise metrics for improved process control

Sean Hannon, John Robinson, Marcelo Cusacovich, Chris Nelson, Harold Kennemer

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600153

KEYWORDS: Overlay metrology, Metrology, Process control, Process modeling, Semiconducting wafers, Image processing, Diagnostics, Metals, Statistical analysis, Visibility

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Proceedings Article | 10 May 2005 Paper

Cost effective CD control for DUV implant layers using the Archer MPX focus-exposure monitor

Sean Hannon, Brad Eichelberger, Chris Nelson, Berta Dinu, Harold Kennemer, Kevin Monahan

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600130

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Metrology, Finite element methods, Scanners, Overlay metrology, Data modeling, Nano opto mechanical systems, Standards development

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