Mr. Sen-Yih Chou Profile

Sen-Yih Chou

R&D Engineer at Industrial Technology Research Institute

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Publications (2)

SPIE Journal Paper | 2 March 2012

Projection moiré profilometry with high-dynamic range image

Sen-Yih Chou, Sien Chi, Chia-Hung Cho, Ming-Jhe Du

OE, Vol. 51, Issue 02, 021112, (March 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.2.021112

KEYWORDS: High dynamic range imaging, CCD cameras, Reflectivity, Digital Light Processing, Cameras, Calibration, Inspection, Spatial resolution, Phase shifts, Modulation

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SPIE Journal Paper | 1 August 2008

Optimal measurement method for scatterometer-based overlay metrology

Yi-Sha Ku, Weite Hsu, Sen-Yih Chou, Deh-Ming Shyu

OE, Vol. 47, Issue 08, 083604, (August 2008) https://doi.org/10.1117/12.10.1117/1.2969120

KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Scatterometry, Scatter measurement, Signal processing, Optical design, Optical engineering, Critical dimension metrology, Reflectivity

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