In the present work, we experimentally demonstrate a suspended tunable subwavelength nanobeam cavity based on our recently proposed advanced dielectric bow-tie design combining ultra-low mode volume and high Q-factor. The nanobeam cavity is efficiently coupled to waveguide ports, allowing full integration with the existing silicon photonic platform and mitigation of the detuning between the optical mode and quantum emitter, which inevitably appears in a coupled system of an emitter and cavity due to fabrication disorder. The tunability of the nanobeam cavity is achieved through nanoelectromechanical actuation using electrostatic comb-drive actuators. The proposed bow-tie nanobeam cavity supports a fundamental optical mode confined in solid in the telecom C-band with a normalized mode volume below 0.12 and Q-factor of 3500. By applying the voltage to the comb-drive actuators, we experimentally observe the dynamic reconfigurability of the cavity resonance wavelength within 11 nm. Our findings can open a new prospect for efficient and tunable nanodevices for enhanced light-matter interactions.
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