Prof. Seung-Woo Kim Profile

Prof. Seung-Woo Kim

Professor of Mechanical Engineering at KAIST

SPIE Involvement:

Author

Publications (73)

Proceedings Article | 12 March 2024 Presentation + Paper

Frequency comb-to-comb synchronization between a 1.3-km free-space link via an optical frequency transfer

Jaewon Yang, Dong-IL Lee, Dong-Chel Shin, Jaehyun Lee, Seung-Woo Kim, Young-Jin Kim

Proceedings Volume 12877, 1287708 (2024) https://doi.org/10.1117/12.3001516

KEYWORDS: Free space optics, Frequency combs, Microwave radiation, Laser stabilization, Atmospheric propagation, Atmospheric optics, Spectroscopy, Optical clocks, Molecular spectroscopy, Metrology

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Proceedings Article | 12 March 2024 Presentation + Paper

Ultraviolet beam pattern control in second and third harmonic generation by spatial wavefront modulation of near-infrared driving wavelength

Seungjai Won, Taewon Kim, Seungman Choi, Byunggi Kim, Seung-Woo Kim, Joohyung Lee, Young-Jin Kim

Proceedings Volume 12869, 128690L (2024) https://doi.org/10.1117/12.3000457

KEYWORDS: Ultraviolet radiation, Wavefronts, Spatial light modulators, Harmonic generation, Third harmonic generation, Deep ultraviolet, Second harmonic generation

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Proceedings Article | 11 March 2024 Presentation + Paper

Frequency-comb-based ultrastable terahertz-frequency synthesizer traceable to an optical reference

Guseon Kang, Dong-Chel Shin, Jaeyoon Kim, Seung-Woo Kim, Young-Jin Kim

Proceedings Volume 12885, 1288507 (2024) https://doi.org/10.1117/12.3001314

KEYWORDS: Terahertz radiation, Frequency combs, Wireless communications, Heterodyning, Terahertz spectroscopy, Signal processing, Principal component analysis, Optical resonators, Industrial applications, Telecommunications

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SPIE Journal Paper | 11 March 2022

Fast and precise laser beam scanning by nonperiodic grating on a binary micromirror array

Jaeyoung Jang, Wooram Kim, Jeong Seok Oh, Seung-Woo Kim, Young-Jin Kim

OE, Vol. 61, Issue 06, 061412, (March 2022) https://doi.org/10.1117/12.10.1117/1.OE.61.6.061412

KEYWORDS: Digital micromirror devices, Micromirrors, Diffraction gratings, Binary data, Distance measurement, Diffraction, Laser scanners, 3D scanning, Mirrors, Optical engineering

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Proceedings Article | 3 September 2019 Paper

Absolute distance measurement system for precise 3D positioning

Seongheum Han, Seungman Kim, Jeong-Seok Oh, Seung-Kook Ro, Seung-Woo Kim

Proceedings Volume 11102, 111021G (2019) https://doi.org/10.1117/12.2528389

KEYWORDS: Positioning equipment, Laser metrology, Optical systems engineering, Optical engineering, Optical systems, Distance measurement, 3D metrology

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Proceedings Article | 3 September 2019 Paper

Multiple absolute distances-based 3D coordinate measurement system for mobile machines

S. Kim, J. Oh, S.-H. Han, Q.-K. Nguyen, S.-K. Ro, S.-W. Kim, W. Kim

Proceedings Volume 11102, 111021E (2019) https://doi.org/10.1117/12.2528343

KEYWORDS: Distance measurement, 3D metrology, Signal detection, 3D acquisition, Detection and tracking algorithms, Optical tracking, Calibration, Retroreflectors, Algorithm development, Pulsed laser operation

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Proceedings Article | 13 June 2017 Paper

Direct comb multi-heterodyne interference spectroscopy

Keunwoo Lee, Jaehyeon Lee, Young-Jin Kim, Seung-Woo Kim

Proceedings Volume 10449, 104491Y (2017) https://doi.org/10.1117/12.2270783

KEYWORDS: Spectroscopy, Femtosecond phenomena, Absorption, Semiconductor lasers, Spectral resolution, Remote sensing, Laser spectroscopy, Gases, Femtosecond fiber lasers, Fiber lasers

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Proceedings Article | 16 March 2016 Paper

Stabilization of two frequency combs with a small relative fceo jitter using diode laser injection locking

Byung Jae Chun, Young-Jin Kim, Seung-Woo Kim

Proceedings Volume 9754, 97540O (2016) https://doi.org/10.1117/12.2212838

KEYWORDS: Frequency combs, Metrology, Ultrafast lasers, Laser optics, Laser stabilization, Optical filters, Bragg cells, Interferometers, Fiber Bragg gratings, Signal to noise ratio

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Proceedings Article | 15 March 2016 Paper

Generation of multiple optical frequencies referenced to a frequency comb for precision free-space frequency transfer

Byung Jae Chun, Hyun Jay Kang, Young-Jin Kim, Seung-Woo Kim

Proceedings Volume 9739, 973915 (2016) https://doi.org/10.1117/12.2212815

KEYWORDS: Free space optics, Atmospheric optics, Frequency combs, Bragg cells, Signal to noise ratio, Singular optics, Channel projecting optics, Interference (communication), Feedback control, Heterodyning

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SPIE Journal Paper | 14 March 2016

Optical inspection of smartphone camera modules by near-infrared low-coherence interferometry

Chang-Yun Lee, Sang-Won Hyun, Young-Jin Kim, Seung-Woo Kim

OE, Vol. 55, Issue 09, 091404, (March 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.9.091404

KEYWORDS: Cameras, Image sensors, Interferometry, Inspection, Optical inspection, Nondestructive evaluation, Image processing, Near infrared, Aspheric lenses, Packaging

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Proceedings Article | 17 July 2015 Paper

EUV generation by plasmonic field enhancement using nanostructures

Seunghwoi Han, Hyunwoong Kim, Young-Jin Kim, Seung-Woo Kim

Proceedings Volume 9524, 95241S (2015) https://doi.org/10.1117/12.2189570

KEYWORDS: Extreme ultraviolet, Nanostructures, Plasmonics, Chemical species, Femtosecond phenomena, Focus stacking software, Lithography, Spectroscopy, Gases, Argon

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Proceedings Article | 6 March 2015 Paper

Absolute distance measurement using frequency-comb-referenced four-wavelength interferometry

Guochao Wang, Yoon-Soo Jang, Hyunjay Kang, Byung Jae Chun, Young-Jin Kim, Seung-Woo Kim

Proceedings Volume 9446, 94464N (2015) https://doi.org/10.1117/12.2182140

KEYWORDS: Distance measurement, Interferometry, Interferometers, Frequency combs, Helium neon lasers, Femtosecond phenomena, Heterodyning, Defense technologies, Space operations, Sum-frequency generation

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Proceedings Article | 6 March 2015 Paper

Recent advances in absolute distance measurements using femtosecond light pulses

Seung-Woo Kim, Young-Jin Kim, Sangwon Hyun, Byung Jae Chun, Yoon-Soo Jang

Proceedings Volume 9446, 94464M (2015) https://doi.org/10.1117/12.2182139

KEYWORDS: Distance measurement, Femtosecond phenomena, Pulsed laser operation, Interferometers, Interferometry, Frequency combs, Atomic clocks, Time metrology, Refractive index, Mode locking

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Proceedings Article | 19 February 2015 Paper

Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses

Young-Jin Kim, Minah Choi, Keunwoo Lee, Heesuk Jang, Jiyong Park, Seung-Woo Kim

Proceedings Volume 9449, 94493D (2015) https://doi.org/10.1117/12.2083260

KEYWORDS: Femtosecond phenomena, Interferometry, Interferometers, 3D metrology, Microelectronics, Fiber lasers, Spatial coherence, Precision measurement, Frequency combs, Mode locking

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SPIE Journal Paper | 8 May 2014

Absolute distance measurement with extension of nonambiguity range using the frequency comb of a femtosecond laser

Yoon-Soo Jang, Keunwoo Lee, Seongheum Han, Joohyung Lee, Young-Jin Kim, Seung-Woo Kim

OE, Vol. 53, Issue 12, 122403, (May 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.12.122403

KEYWORDS: Distance measurement, Femtosecond phenomena, Signal detection, Interferometry, Light sources, Phase measurement, Interferometers, Frequency combs, Optical engineering, Optical testing

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Proceedings Article | 9 October 2012 Paper

Nanoplasmonic generation of ultrashort EUV pulses

Joonhee Choi, Dong-Hyub Lee, Seunghwoi Han, In-Yong Park, Seungchul Kim, Seung-Woo Kim

Proceedings Volume 8457, 84571B (2012) https://doi.org/10.1117/12.929403

KEYWORDS: Extreme ultraviolet, Near infrared, Waveguides, Plasmonics, Argon, Optical filters, Chemical species, Neon, Femtosecond phenomena, Aluminum

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Proceedings Article | 21 September 2011 Paper

Plasmonic field enhancement for generating ultrafast extreme-ultraviolet light pulses

In-Yong Park, Seungchul Kim, Joonhee Choi, Dong-Hyub Lee, Seung-Woo Kim

Proceedings Volume 8096, 80960S (2011) https://doi.org/10.1117/12.893150

KEYWORDS: Waveguides, Extreme ultraviolet, Near infrared, Plasmonics, Silver, Aluminum, Metals, Nanostructures, Ion beams, Scanning electron microscopy

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Proceedings Article | 20 September 2011 Paper

High precision surface-profile metrology by scanning the repetition rate of femtosecond pulses

Woo-Deok Joo, Young-Jin Kim, Yunseok Kim, Jiyong Park, Seung-Woo Kim

Proceedings Volume 8105, 810507 (2011) https://doi.org/10.1117/12.893278

KEYWORDS: Femtosecond phenomena, Interferometers, Metrology, Interferometry, Light sources, Optical testing, Mirrors, Temporal coherence, Spatial coherence, Mode locking

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Proceedings Article | 11 November 2010 Paper

Time-of-flight measurement with femtosecond pulses for high precision ranging lidar

J. Lee, Y.-J. Kim, K. Lee, S. Lee, S.-W. Kim

Proceedings Volume 7860, 78600O (2010) https://doi.org/10.1117/12.878899

KEYWORDS: Distance measurement, Femtosecond phenomena, LIDAR, Optical amplifiers, Mirrors, Crystals, Ferroelectric materials, Ranging, Crystal optics, Femtosecond fiber lasers

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Proceedings Article | 11 September 2010 Open Access

High harmonic generation by guided surface plasmon polaritons

Joonhee Choi, Seungchul Kim, In-Yong Park, Seung-Woo Kim

Proceedings Volume 7757, 77571D (2010) https://doi.org/10.1117/12.860326

KEYWORDS: Waveguides, Nanostructures, Signal detection, Extreme ultraviolet, Finite-difference time-domain method, Near field scanning optical microscopy, Femtosecond phenomena, High harmonic generation, Surface plasmon polaritons, Surface plasmons

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Proceedings Article | 10 September 2009 Paper

Continuous scanning phase measurement for high immunity to vibration

Jungjae Park, Joonho You, Seung-Woo Kim

Proceedings Volume 7432, 74320O (2009) https://doi.org/10.1117/12.825793

KEYWORDS: Phase measurement, Single mode fibers, Spherical lenses, Interferometers, Detection and tracking algorithms, Mirrors, Error analysis, Phase shifting, Ferroelectric materials, Wavefronts

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Proceedings Article | 3 September 2009 Open Access

High harmonics generation by plasmonic field enhancement

Seung-Woo Kim, Seungchul Kim, In-Yong Park, Jonghan Jin

Proceedings Volume 7394, 73940U (2009) https://doi.org/10.1117/12.826645

KEYWORDS: Nanostructures, High harmonic generation, Femtosecond phenomena, Surface plasmons, Nanolithography, Xenon, Plasmonics, Argon, Near field, Pulsed laser operation

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Proceedings Article | 3 September 2009 Paper

Design of nanostructures for high harmonic generation by localized surface plasmon resonance

In-Yong Park, Seungchul Kim, Joonhee Choi, Jonghan Jin, Seung-Woo Kim

Proceedings Volume 7394, 73940V (2009) https://doi.org/10.1117/12.826776

KEYWORDS: Nanostructures, Finite-difference time-domain method, Nanolithography, High harmonic generation, Femtosecond phenomena, Signal detection, Surface plasmons, Extreme ultraviolet, Metals, Electronic filtering

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Proceedings Article | 11 August 2008 Paper

Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures

Woo-Deok Joo, Joonho You, Young-Sik Ghim, Seung-Woo Kim

Proceedings Volume 7063, 70630Q (2008) https://doi.org/10.1117/12.797523

KEYWORDS: Thin films, Objectives, Reflectometry, Reflectivity, Metrology, Optical filters, Polarization, Interfaces, Light, Data modeling

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Proceedings Article | 11 August 2008 Paper

Surface metrology of silicon wafers using a femtosecond pulse laser

Taekmin Kwon, Ki-Nam Joo, Seung-Woo Kim

Proceedings Volume 7063, 706310 (2008) https://doi.org/10.1117/12.797040

KEYWORDS: Semiconducting wafers, Silicon, Femtosecond phenomena, Interferometry, Polishing, Mirrors, Semiconductor lasers, Pulsed laser operation, Inspection, Transmittance

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Proceedings Article | 14 September 2007 Paper

Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry

Young-Sik Ghim, Joonho You, Seung-Woo Kim

Proceedings Volume 6674, 667402 (2007) https://doi.org/10.1117/12.732311

KEYWORDS: Thin films, Interferometry, Silicon, Refractive index, Mirrors, Optical filters, Chemical mechanical planarization, Inspection, Semiconductors, 3D displays

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Proceedings Article | 18 June 2007 Paper

Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays

Young-Sik Ghim, Joonho You, Seung-Woo Kim

Proceedings Volume 6616, 66160T (2007) https://doi.org/10.1117/12.726040

KEYWORDS: Thin films, Interferometry, Spectroscopy, Metrology, Inspection, Charge-coupled devices, 3D metrology, 3D acquisition, Data modeling, Phase measurement

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Proceedings Article | 18 June 2007 Paper

Grating projection Moire interferometry for high-speed 3D inspection of mesoscale objects

Sang-Yoon Lee, Min-Gu Kang, Seung-Woo Kim

Proceedings Volume 6616, 661625 (2007) https://doi.org/10.1117/12.726020

KEYWORDS: Phase shifts, Inspection, Deflectometry, 3D metrology, 3D acquisition, Phase shifting, Image processing, Manufacturing, Optical interferometry, Target detection

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Proceedings Article | 30 August 2006 Paper

AFM-based nanofabrication with femtosecond pulse laser radiation

Seungchul Kim, Seung-Woo Kim

Proceedings Volume 6324, 63240S (2006) https://doi.org/10.1117/12.678118

KEYWORDS: Femtosecond phenomena, Chemical species, Gold, Nanofabrication, Pulsed laser operation, Metals, Near field optics, Thermography, Atomic force microscopy, Computer simulations

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Proceedings Article | 14 August 2006 Paper

Dispersive interferometry using femtosecond pulse laser for measuring refractive index and physical thickness of test samples

Ki-Nam Joo, Seung-Woo Kim

Proceedings Volume 6292, 62920N (2006) https://doi.org/10.1117/12.678461

KEYWORDS: Refractive index, Femtosecond phenomena, Interferometry, Distance measurement, Spectroscopy, Mirrors, Pulsed laser operation, Laser interferometry, Silica, Interferometers

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Proceedings Article | 14 August 2006 Paper

Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser

Jonghan Jin, Young-Jin Kim, Yunseok Kim, Chu-Shik Kang, Seung-Woo Kim

Proceedings Volume 6292, 62920O (2006) https://doi.org/10.1117/12.678448

KEYWORDS: Calibration, Femtosecond phenomena, Interferometers, Rubidium, Interferometry, Pulsed laser operation, Laser stabilization, Clocks, Laser optics, Barium

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Proceedings Article | 14 August 2006 Paper

A point-diffraction interferometer with vibration-desensitizing capability

Hagyong Kihm, Jungjae Park, Taekmin Kwon, Joon Ho You, Seung-Woo Kim

Proceedings Volume 6293, 62930B (2006) https://doi.org/10.1117/12.678691

KEYWORDS: Interferometers, Optical fibers, Phase shifts, Beam splitters, Wave plates, Spherical lenses, Semiconducting wafers, Polarization, Waveguides, Wavefronts

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Proceedings Article | 14 August 2006 Paper

Absolute distance measurements using point-diffracted spherical waves

Jiyoung Chu, Seung-Woo Kim

Proceedings Volume 6293, 62930P (2006) https://doi.org/10.1117/12.678690

KEYWORDS: Distance measurement, Wavefronts, Spherical lenses, Interferometry, Photodetectors, Monochromatic aberrations, Single mode fibers, Optical fibers, Interferometers, Diffraction

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SPIE Journal Paper | 1 December 2005

Oblique fiber optic diffraction interferometer for testing spherical mirrors

Hagyong Kihm, Seung-Woo Kim

OE, Vol. 44, Issue 12, 125601, (December 2005) https://doi.org/10.1117/12.10.1117/1.2148367

KEYWORDS: Interferometers, Mirrors, Spherical lenses, Diffraction, Fiber optics, Single mode fibers, Optical testing, Fiber optics tests, Polishing, Coating

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Proceedings Article | 27 August 2005 Paper

Absolute distance measurement using femtosecond laser

Seung-Woo Kim, Ki-Nam Joo, Jonghan Jin, Yun Seok Kim

Proceedings Volume 5858, 58580N (2005) https://doi.org/10.1117/12.612238

KEYWORDS: Femtosecond phenomena, Distance measurement, Interferometry, Heterodyning, Spectroscopy, Mirrors, Interferometers, Fabry–Perot interferometers, Mode locking, Pulsed laser operation

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Proceedings Article | 13 June 2005 Paper

Point-diffraction fiber interferometer for vibration desensitization

Jungjae Park, Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612473

KEYWORDS: Interferometers, Glasses, Phase shifts, Spherical lenses, Beam splitters, Wavefronts, Polarization, Waveguides, Mirrors, Wave plates

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Proceedings Article | 13 June 2005 Paper

Dispersive white-light interferometry for thin-film thickness profile measurement

Young-Sik Ghim, Seung-Woo Kim

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612076

KEYWORDS: Spectroscopy, Interferometry, Thin films, Interferometers, Mirrors, Light sources, Phase measurement, Metrology, Inspection, 3D acquisition

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Proceedings Article | 10 February 2005 Paper

Nonparaxial Fresnel diffraction from oblique end facets of optical fibers

Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.574055

KEYWORDS: Diffraction, Single mode fibers, Wavefronts, Spherical lenses, Optical fibers, Near field diffraction, Wave propagation, Light wave propagation, Fizeau interferometers, Interferometers

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Proceedings Article | 17 January 2005 Paper

Low-coherence interferometry for 3D measurements of microelectronics packaging and integration

Seung-Woo Kim, Young-Sik Ghim

Proceedings Volume 5644, (2005) https://doi.org/10.1117/12.573394

KEYWORDS: Interferometry, Reflection, Thin films, 3D metrology, Microelectronics, Objectives, Metrology, Phase interferometry, Sensors, Packaging

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SPIE Journal Paper | 1 September 2004

Diffraction-grating interferometer for testing aspheric concave mirrors with optimization of fringe visibility

Tae-Joon Hwang, Seung-Woo Kim

OE, Vol. 43, Issue 09, (September 2004) https://doi.org/10.1117/12.10.1117/1.1778177

KEYWORDS: Diffraction gratings, Mirrors, Computer generated holography, Interferometers, Diffraction, Aspheric optics, Aspheric lenses, Visibility, Wavefronts, Transmittance

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Proceedings Article | 2 August 2004 Paper

Visibility optimization of phase-shifting diffraction-grating interferometer

Tae-Joon Hwang, Seung-Woo Kim

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.559349

KEYWORDS: Diffraction gratings, Diffraction, Wavefronts, Interferometers, Phase shifts, Computer generated holography, Mirrors, Visibility, Polarization, Reflectivity

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Proceedings Article | 2 August 2004 Paper

Two-point diffraction interferometer for absolute distance measurement

Seung-Woo Kim, Hyug-Gyo Rhee, Jiyoung Joo, Young Jin Kim

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.558834

KEYWORDS: Interferometers, Diffraction, Spherical lenses, Heterodyning, Homodyne detection, Charge-coupled devices, Distance measurement, Calibration, Helium neon lasers, Interferometry

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Proceedings Article | 10 November 2003 Paper

Point-diffraction interferometer for 3D profile measurement of rough surfaces

Seung-Woo Kim, Byoung-Chang Kim

Proceedings Volume 5191, (2003) https://doi.org/10.1117/12.507074

KEYWORDS: Diffraction, Interferometers, Wavefronts, Optical fibers, Fringe analysis, Spherical lenses, 3D metrology, Phase measurement, Inspection, Single mode fibers

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Proceedings Article | 28 August 2003 Paper

Error propagation in calibration of e-beam lithography stages

Seungbong Yoo, Seung-Woo Kim

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504262

KEYWORDS: Calibration, Inspection, Electron beam lithography, Error analysis, Uncertainty analysis, Motion measurement, Fourier transforms, Optical inspection, Photomasks, Microscopes

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Proceedings Article | 30 May 2003 Paper

Oblique point-diffraction source for interferometer design

Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500253

KEYWORDS: Optical fibers, Single mode fibers, Spherical lenses, Interferometers, Diffraction, Wavefronts, Optical testing, Coating, Beam splitters, Refractive index

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Proceedings Article | 30 May 2003 Paper

Phase-shifting diffraction grating interferometer for testing concave mirrors

Tae-Joon Hwang, Seung-Woo Kim

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500194

KEYWORDS: Diffraction gratings, Mirrors, Wavefronts, Interferometers, Reflectivity, Phase shifts, Diffraction, Spherical lenses, Optical testing, Single mode fibers

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SPIE Journal Paper | 1 August 2002

Color grating projection moire with time-integral fringe capturing for high-speed 3-D imaging

Moon-sik Jeong, Seung-Woo Kim

OE, Vol. 41, Issue 08, (August 2002) https://doi.org/10.1117/12.10.1117/1.1487855

KEYWORDS: Phase shifts, RGB color model, Cameras, 3D image processing, 3D metrology, CCD cameras, Phase shifting, Image processing, Fringe analysis, Stereoscopy

Proceedings Article | 20 June 2002 Paper

Compensation for phase change on reflection in white-light scanning interferometry

Min-Cheol Park, MinGu Kang, Seung-Woo Kim

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472212

KEYWORDS: Interferometry, Reflection, Light sources, Phase interferometry, Metals, Glasses, Fourier transforms, Calibration, Optical interferometry, Objectives

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Proceedings Article | 20 June 2002 Paper

Fiber optic diffraction interferometer for testing spherical mirrors

Hagyong Kihm, Seung-Woo Kim

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472239

KEYWORDS: Spherical lenses, Interferometers, Mirrors, Optical fibers, Diffraction, Fiber optics, Calibration, Fiber optics tests, Phase shifts, Ferroelectric materials

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Proceedings Article | 20 June 2002 Paper

Super-heterodyning phase measurement for heterodyne interferometry

Min Seok Kim, Jun Young Lee, Seung-Woo Kim

Proceedings Volume 4777, (2002) https://doi.org/10.1117/12.472241

KEYWORDS: Phase measurement, Heterodyning, Doppler effect, Interferometers, Electronics, Interferometry, Clocks, Switching, Mirrors, Signal generators

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SPIE Journal Paper | 1 February 2002

Optical performance evaluation of thin-film micromirror array in projection display

Youngshik Jo, Dong-Seon Yoon, Seung-Woo Kim, Kyu-Ho Hwang

OE, Vol. 41, Issue 02, (February 2002) https://doi.org/10.1117/12.10.1117/1.1430421

KEYWORDS: Mirrors, Micromirrors, Diffraction, Computer simulations, Thin films, Optical engineering, Geometrical optics, Mechanical engineering, Etching, Distortion

Proceedings Article | 26 November 2001 Paper

Multipoint diffraction interferometry for 3D profilometry

Seung-Woo Kim, Byoung-Chang Kim

Proceedings Volume 4448, (2001) https://doi.org/10.1117/12.449375

KEYWORDS: Diffraction, Interferometry, 3D acquisition, Spherical lenses, Wavefronts, Phase measurement, Optical diagnostics, Solids, Combustion, 3D metrology

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Proceedings Article | 13 June 2001 Paper

Phase-shifting projection moire for out-of-plane displacement measurement

Moon-sik Jeong, Seung-Woo Kim

Proceedings Volume 4317, (2001) https://doi.org/10.1117/12.429566

KEYWORDS: Moire patterns, Phase shifting, 3D metrology, Phase shifts, Fringe analysis, Magnesium, 3D modeling, 3D acquisition, Phase measurement, Reflectivity

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Proceedings Article | 10 October 2000 Paper

Automatic inspection of geometric accuracy of optical fiber ferrules by machine vision

Gee-Hong Kim, Seung-Woo Kim, SangGun Lim

Proceedings Volume 4222, (2000) https://doi.org/10.1117/12.403848

KEYWORDS: Inspection, Optical fibers, Machine vision, Connectors, Tolerancing, Edge detection, Detection and tracking algorithms, Optical inspection, Optics manufacturing, Laser scanners

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Proceedings Article | 5 October 2000 Paper

Compensation of phase change upon reflection in white light interferometry

Min-Cheol Park, Seung-Woo Kim

Proceedings Volume 4223, (2000) https://doi.org/10.1117/12.401757

KEYWORDS: Optical interferometry, Phase interferometry, Interferometry, Reflection, Michelson interferometers, Objectives, Light sources, Phase shift keying, Metals, Detection and tracking algorithms

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SPIE Journal Paper | 1 April 2000

Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms

Min-Cheol Park, Seung-Woo Kim

OE, Vol. 39, Issue 04, (April 2000) https://doi.org/10.1117/12.10.1117/1.602445

KEYWORDS: Visibility, Interferometry, Computer simulations, Reflection, Optical engineering, Transform theory, Phase measurement, Detection and tracking algorithms, Optical interferometry, Wavelet transforms

Proceedings Article | 16 March 2000 Paper

Scanning projection grating moire topography

Jung-Taek Oh, SangYoon Lee, Seung-Woo Kim

Proceedings Volume 3958, (2000) https://doi.org/10.1117/12.380054

KEYWORDS: Moire patterns, 3D metrology, Fringe analysis, 3D image processing, Phase shifts, Visibility, Interferometry, Metrology, Phase shifting, CCD cameras

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Proceedings Article | 13 October 1999 Paper

White-light scanning interferometry for thickness measurement of thin film layers

Gee-Hong Kim, Seung-Woo Kim

Proceedings Volume 3783, (1999) https://doi.org/10.1117/12.365742

KEYWORDS: Thin films, Interferometry, Reflection, Objectives, Silicon, Visibility, Opacity, 3D metrology, Mirrors, Phase measurement

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Proceedings Article | 21 September 1999 Paper

Rapid defect inspection of display devices with optical spatial filtering

Seung-Woo Kim, Dong-Seon Yoon

Proceedings Volume 3824, (1999) https://doi.org/10.1117/12.364265

KEYWORDS: Spatial filters, Inspection, LCDs, Light sources, Image filtering, Fourier transforms, Optical filters, Light, Plasma display panels, Collimation

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SPIE Journal Paper | 1 June 1999

Precision profile measurement of aspheric surfaces by improved Ronchi test

Ho-Jae Lee, Seung-Woo Kim

OE, Vol. 38, Issue 06, (June 1999) https://doi.org/10.1117/12.10.1117/1.602147

KEYWORDS: Aspheric lenses, Wavefronts, Ronchi rulings, Precision measurement, Diffraction gratings, Spherical lenses, Calibration, Phase shifts, Interferometry, Diffraction

Proceedings Article | 7 May 1999 Paper

White light phase-shifting interferometry with self-compensation of PZT scanning errors

Seung-Woo Kim, MinGu Kang, SangYoon Lee

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347782

KEYWORDS: Ferroelectric materials, Calibration, Error analysis, Actuators, Interferometry, Phase interferometry, Ceramics, Statistical analysis, Light, Optical interferometry

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Proceedings Article | 29 December 1998 Paper

Two-frequency phase-shifting projection moire topography

Seung-Woo Kim, Jung-Taek Oh, Moon-Sik Jung, Yi-Bae Choi

Proceedings Volume 3520, (1998) https://doi.org/10.1117/12.334348

KEYWORDS: Moire patterns, Phase shifts, Reflectivity

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SPIE Journal Paper | 1 March 1998

Phase-shifting grating projection moire topography

Yi-Bae Choi, Seung-Woo Kim

OE, Vol. 37, Issue 03, (March 1998) https://doi.org/10.1117/12.10.1117/1.601934

KEYWORDS: Phase shifts, Fringe analysis, Optical design, Image processing, Reflectivity, Phase measurement, Charge-coupled devices, Phase shifting, Electromagnetic radiation, Interferometry

Proceedings Article | 12 December 1997 Paper

Statistical analysis on the measuring resolution of edge position by digital imaging

Seung-Woo Kim, SangYoon Lee, Jeong Lee

Proceedings Volume 3173, (1997) https://doi.org/10.1117/12.294524

KEYWORDS: Digital imaging, Image resolution, Statistical analysis, Optical imaging, Integrated circuits, Semiconductors, Digital electronics, Overlay metrology, Metrology, Optoelectronics

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SPIE Journal Paper | 1 December 1997

Rapid pattern inspection of shadow masks by machine vision integrated with Fourier optics

Seung-Woo Kim, SangYoon Lee, Dong-Seon Yoon

OE, Vol. 36, Issue 12, (December 1997) https://doi.org/10.1117/12.10.1117/1.601570

KEYWORDS: Inspection, Fourier optics, Machine vision, Photomasks, Spatial filters, Image processing, Optical inspection, Signal to noise ratio, Defect detection, Image filtering

SPIE Journal Paper | 1 November 1997

Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry

Seung-Woo Kim, MinGu Kang, Geon-Soo Han

OE, Vol. 36, Issue 11, (November 1997) https://doi.org/10.1117/12.10.1117/1.601546

KEYWORDS: Phase shifts, Phase interferometry, Photodetectors, Wavefronts, Phase shifting, Optical engineering, Interferometers, Interferometry, Phase shift keying, Numerical analysis

Proceedings Article | 21 March 1997 Paper

Projection moire for 3D inspection of printed circuit boards

Seung-Woo Kim, Yi-Bae Choi, Jung-Taek Oh

Proceedings Volume 3023, (1997) https://doi.org/10.1117/12.269750

KEYWORDS: Moire patterns, Phase shifts, Inspection, Calibration, Sensors, Phase shifting, 3D metrology, Image processing, Spatial frequencies, CCD cameras

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SPIE Journal Paper | 1 March 1997

Stable lateral-shearing interferometer for production-line inspection of lenses

Woo-Jong Cho, Seung-Woo Kim

OE, Vol. 36, Issue 03, (March 1997) https://doi.org/10.1117/12.10.1117/1.601142

KEYWORDS: Prisms, Interferometers, Wavefronts, Phase shifts, Inspection, Phase shifting, Lenses, Aspheric lenses, Interferometry, Collimation

Proceedings Article | 20 January 1997 Paper

Three-dimensional profile measurement of fine objects by phase-shifting shadow moire interferometry

Seung-Woo Kim, Yi-Bae Choi, Jung-Taek Oh

Proceedings Volume 2909, (1997) https://doi.org/10.1117/12.263330

KEYWORDS: Phase shifts, Deflectometry, Phase shifting, Moire patterns, Inspection, Phase measurement, Calibration, 3D metrology, Sensors, Interferometry

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Proceedings Article | 21 May 1996 Paper

Linewidth measurement of wafers using SEM and its uncertainty evaluation

Yeong-Uk Ko, TaeBong Eom, Ki-Hong Kim, Seung-Woo Kim

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240080

KEYWORDS: Scanning electron microscopy, Interferometers, Electron beams, Calibration, Semiconducting wafers, Standards development, Statistical analysis, Electron microscopes, Semiconductors, Image resolution

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SPIE Journal Paper | 1 May 1995

Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors

In-Bok Kong, Seung-Woo Kim

OE, Vol. 34, Issue 05, (May 1995) https://doi.org/10.1117/12.10.1117/12.201667

KEYWORDS: Phase shifts, Phase interferometry, Mirrors, Inspection, Prototyping, Sensors, Phase shifting, Calibration, Wavefronts, Image processing

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SPIE Journal Paper | 1 January 1995

General algorithm of phase-shifting interferometry by iterative least-squares fitting

In-Bok Kong, Seung-Woo Kim

OE, Vol. 34, Issue 01, (January 1995) https://doi.org/10.1117/12.10.1117/12.184088

KEYWORDS: Phase shifts, Phase interferometry, Sensors, Wavefronts, Computer simulations, Detection and tracking algorithms, Interferometry, Actuators, Environmental sensing, Error analysis

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Proceedings Article | 21 December 1994 Paper

Image compression based on wavelet transform for remote sensing

Heung-Kyu Lee, Seung-Woo Kim, Kyung Kim, Soon-Dal Choi

Proceedings Volume 2318, (1994) https://doi.org/10.1117/12.197239

KEYWORDS: Image compression, Wavelet transforms, Wavelets, Multispectral imaging, Landsat, Satellite imaging, Earth observing sensors, Satellites, Remote sensing, Algorithm development

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