Dr. Chin-Wei Shen Profile

Dr. Chin-Wei Shen

Section Manager at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Area of Expertise:

EUV mask process , Photomask inspection , Photomask cleaning , Photomask repair , Pellicle handling , Equipment developement

Publications (2)

Proceedings Article | 28 June 2013 Paper

Physical force optimization for advanced photomask cleaning

C. W. Shen, K. W. Lin, C. L. Lu, Luke Hsu, Angus Chin, Anthony Yen

Proceedings Volume 8701, 870106 (2013) https://doi.org/10.1117/12.2028484

KEYWORDS: Particles, SRAF, Mask cleaning, Photomasks, Inspection, Binary data, Acoustics, Opacity, Cavitation, Diffractive optical elements

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Proceedings Article | 8 November 2012 Paper

Sub-20-nm node photomask cleaning enhancement by controlling zeta potential

Kuan-Wen Lin, Chi-Lun Lu, Chin-Wei Shen, Luke Hsu, Angus Chin, Anthony Yen

Proceedings Volume 8522, 852213 (2012) https://doi.org/10.1117/12.975822

KEYWORDS: Particles, Mask cleaning, Photomasks, Quartz, Chemical analysis, Critical dimension metrology, Semiconductor manufacturing, Silicon, Inspection, Manufacturing

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