Dr. Sheng-Yung Chen Profile

Dr. Sheng-Yung Chen

Staff Engineer at PDF Solutions Inc

SPIE Involvement:

Author

Area of Expertise:

Nanolithography , Design for Manufacturability , Biomedical , Ultrasonics , Inter-vehicle communication

Publications (3)

Proceedings Article | 28 March 2017 Presentation + Paper

Fabrication of metrology test structures with helium ion beam direct write

Chien-Lin Lee, Sheng-Wei Chien, Sheng-Yung Chen, Chun-Hung Liu, Kuen-Yu Tsai, Jia-Han Li, Bor-Yuan Shew, Chit-Sung Hong, Chao-Te Lee

Proceedings Volume 10145, 1014519 (2017) https://doi.org/10.1117/12.2257989

KEYWORDS: Metrology, Electron beam lithography, Lithography, Helium, Ion beams, Critical dimension metrology, Inspection, Photoresist processing, Optical lithography, Bridges

Read Abstract +

SPIE Journal Paper | 22 August 2012

New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints

Hoi-Tou Ng, Yu-Tian Shen, Sheng-Yung Chen, Chun-Hung Liu, Philip Ng, Kuen-Yu Tsai

JM3, Vol. 11, Issue 3, 033007, (August 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.3.033007

KEYWORDS: Electron beam lithography, Monte Carlo methods, Line edge roughness, Computer simulations, Critical dimension metrology, Transistors, Optical simulations, Diffusion, Optimization (mathematics), Point spread functions

Read Abstract +

Proceedings Article | 14 December 2009 Paper

Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography

Sheng-Yung Chen, Kuen-Yu Tsai, Hoi-Tou Ng, Chi-Hsiang Fan, Ting-Hang Pei, Chieh-Hsiung Kuan, Yung-Yaw Chen, Jia-Yush Yen

Proceedings Volume 7520, 75202K (2009) https://doi.org/10.1117/12.837048

KEYWORDS: Sensors, Monte Carlo methods, Electron beams, Signal detection, Lithography, Electron beam lithography, Detector arrays, Optical simulations, Semiconducting wafers, Silicon

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years