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Dr. Shifang Li
Sr. Dir. System Engineering at Applied Materials Inc
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Publications (4)
Proceedings Article | 20 March 2020 Paper
Massive metrology for process development and monitoring applications
Proceedings Volume 11325, 1132528 (2020) https://doi.org/10.1117/12.2553092
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Modulation, Inspection, Copper, Chemical mechanical planarization, Defect inspection, Extreme ultraviolet lithography, Back end of line
Proceedings Article | 5 April 2007 Paper
Scatterometry on pelliclized masks: an option for wafer fabs
Emily Gallagher, Craig Benson, Masaru Higuchi, Yasuhiro Okumoto, Michael Kwon, Sanjay Yedur, Shifang Li, Sangbong Lee, Milad Tabet
Proceedings Volume 6518, 65181T (2007) https://doi.org/10.1117/12.714997
KEYWORDS: Pellicles, Photomasks, Scatterometry, Metrology, Critical dimension metrology, Semiconducting wafers, Quartz, Data modeling, Scatter measurement, Cadmium
Proceedings Article | 2 November 2000 Paper
Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO2
JingMin Leng, Shifang Li, Jon Opsal, David Aspnes, Byoung Lee, Jack Lee
Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405823
KEYWORDS: Interfaces, Hafnium, Transmission electron microscopy, Dielectrics, Silicates, Semiconducting wafers, Silicon, Spectroscopic ellipsometry, Oxides, Sputter deposition
Proceedings Article | 12 December 1994 Open Access Paper
Matter-wave/atom interferometry
Proceedings Volume 2340, (1994) https://doi.org/10.1117/12.195895
KEYWORDS: Chemical species, Interferometers, Laser scattering, Interferometry, Scattering, Fringe analysis, Microscopes, Photons, Diffraction gratings, Diffraction
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