Dr. Shiyu Sun Profile

Dr. Shiyu Sun

Senior Process Integration Engineer at Applied Materials Inc

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Publications (3)

Proceedings Article | 23 March 2011 Paper

Sidewall spacer quadruple patterning for 15nm half-pitch

Ping Xu, Yongmei Chen, Yijian Chen, Liyan Miao, Shiyu Sun, Sung-Woo Kim, Ami Berger, Daxin Mao, Christ Bencher, Raymond Hung, Chris Ngai

Proceedings Volume 7973, 79731Q (2011) https://doi.org/10.1117/12.881547

KEYWORDS: Etching, Optical lithography, Silicon, Scanning electron microscopy, Line width roughness, Lithography, Double patterning technology, Semiconducting wafers, Oxides, Neodymium

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Proceedings Article | 16 March 2009 Paper

Alignment and overlay improvements for 3x nm and beyond process with CVD sidewall spacer double patterning

Huixiong Dai, Chris Bencher, Yongmei Chen, Shiyu Sun, Xumou Xu, Chris Ngai

Proceedings Volume 7274, 72743G (2009) https://doi.org/10.1117/12.814376

KEYWORDS: Optical alignment, Semiconducting wafers, Photomasks, Double patterning technology, Optical lithography, Scanners, Etching, Chemical vapor deposition, Manufacturing, Lithography

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Proceedings Article | 16 March 2009 Paper

Demonstration of 32nm half-pitch electrical testable NAND FLASH patterns using self-aligned double patterning

Shiyu Sun, Chris Bencher, Yongmei Chen, Huixiong Dai, Man-Ping Cai, Jaklyn Jin, Pokhui Blanco, Liyan Miao, Ping Xu, Xumou Xu, James Yu, Raymond Hung, Shiany Oemardani, Osbert Chan, Chorng-Ping Chang, Chris Ngai

Proceedings Volume 7274, 72740D (2009) https://doi.org/10.1117/12.814403

KEYWORDS: Lithography, Resistance, Etching, Double patterning technology, Photomasks, Optical lithography, Scanning electron microscopy, Oxides, Photoresist materials, Line edge roughness

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