Dr. Sonia Castellanos
at Inpria Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (12)

Proceedings Article | 10 April 2024 Presentation + Paper
Sonia Castellanos, Peter De Schepper, Maireyee Bhattacharya, Jan Doise, Joren Wouters, Amrit Narasimhan, Brian Cardineau, Lauren McQuade, Craig Needham, Michael Kocsis, Kazuki Kasahara, Stephen Meyers
Proceedings Volume 12957, 1295707 (2024) https://doi.org/10.1117/12.3010921
KEYWORDS: Humidity, Extreme ultraviolet lithography, Critical dimension metrology, Printing, Contamination, Semiconducting wafers, Metal oxides, Image processing, Environmental sensing, Chemical analysis

Proceedings Article | 22 February 2021 Presentation
Petra Swiderek, Markus Rohdenburg, Neha Thakur, Sonia Castellanos
Proceedings Volume 11612, 116120B (2021) https://doi.org/10.1117/12.2584166
KEYWORDS: Chemistry, Nanotechnology, Extreme ultraviolet lithography, Electrons, Metals, Chemical reactions, Nanofabrication, Molecules, Electron beams, Radiation interaction with matter

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11610, 1161011 (2021) https://doi.org/10.1117/12.2595048
KEYWORDS: Lithography, Extreme ultraviolet, Mirrors, Extreme ultraviolet lithography, Ultrafast phenomena, Photoresist materials, Yield improvement, Semiconductor manufacturing, Semiconducting wafers, Scanning electron microscopy

SPIE Journal Paper | 9 November 2019 Open Access
Neha Thakur, Li-Ting Tseng, Michaela Vockenhuber , Yasin Ekinci, Sonia Castellanos
JM3, Vol. 18, Issue 04, 043504, (November 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.4.043504
KEYWORDS: Thin films, Zinc, Extreme ultraviolet lithography, Photoresist materials, Metals, FT-IR spectroscopy, Lithography, Absorption, Spectroscopy

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10957, 109570B (2019) https://doi.org/10.1117/12.2515264
KEYWORDS: Doping, Extreme ultraviolet lithography, Fluorine, Metals, Extreme ultraviolet, Thin films, Absorption, Lithography, Photons, Iodine, Photoresist materials, Inorganic hybrid materials

Showing 5 of 12 publications
Conference Committee Involvement (6)
Advances in Patterning Materials and Processes XLI
26 February 2024 | San Jose, California, United States
Advances in Patterning Materials and Processes XL
27 February 2023 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIX
25 April 2022 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography XII
22 February 2021 | Online Only, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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