Dr. Steven Rowley Profile

Dr. Steven Rowley

at Camfil Farr

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 4 December 2008 Paper

Reducing capital and labor costs of 193nm lithography monitoring of airborne molecular contamination (AMC) through proactive assessment and implementation of AMC monitoring techniques and strategies

Steven Rowley, Jerry Yang, Andy Wei

Proceedings Volume 7140, 71400U (2008) https://doi.org/10.1117/12.803919

KEYWORDS: Contamination, Statistical analysis, Ions, 193nm lithography, Chemical analysis, Lithography, Semiconductors, Semiconductor manufacturing, Manufacturing, Semiconducting wafers

Read Abstract +

Proceedings Article | 5 April 2007 Paper

Monitoring airborne molecular contamination: a quantitative and qualitative comparison of real-time and grab-sampling techniques

Aaron Shupp, Dan Rodier, Steven Rowley

Proceedings Volume 6518, 65183Z (2007) https://doi.org/10.1117/12.707776

KEYWORDS: Liquids, Sulfur, Particles, Statistical analysis, Ions, Particle systems, Contamination, Standards development, Calibration, Error analysis

Read Abstract +

Proceedings Article | 24 May 2004 Paper

Real-time optics contamination monitoring using surface acoustic wave technology

Steven Rowley

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.531988

KEYWORDS: Contamination, Optical components, Optical filters, Sensors, Gases, Acoustics, Crystals, Adsorption, Linear filtering, Optical lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years