Mr. Steven R. Young Profile

Steven R. Young

at Motorola Inc

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Author

Publications (3)

Proceedings Article | 3 May 2007 Paper

Electron beam directed repair of fused silica imprint templates

Gerard Schmid, Douglas Resnick, Rainer Fettig, Klaus Edinger, Steven Young, William Dauksher

Proceedings Volume 6533, 65330P (2007) https://doi.org/10.1117/12.736921

KEYWORDS: Silica, Photomasks, Lithography, Etching, Electron beams, Scanning electron microscopy, Chromium, Atomic force microscopy, Nanoimprint lithography, Liquids

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Proceedings Article | 23 March 2006 Paper

Evaluation of FIB and e-beam repairs for implementation on step and flash imprint lithography templates

S. Young, W. Dauksher, K. Nordquist, E. Ainley, K. Gehoski, A. Graupera, M. Moriarty

Proceedings Volume 6151, 61511D (2006) https://doi.org/10.1117/12.659529

KEYWORDS: Quartz, Chromium, Etching, Scanning electron microscopy, Photomasks, Atomic force microscopy, Image processing, Opacity, Semiconducting wafers, Lithography

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Proceedings Article | 20 May 2004 Paper

Sub-80-nm contact hole patterning using Step and Flash Imprint Lithography

David Mancini, Ngoc Le, Kathleen Gehoski, Steven Young, William Dauksher, Kevin Nordquist, Douglas Resnick

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537382

KEYWORDS: Etching, Lithography, Silicon, Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Quartz, Oxides, Photomasks, Printing

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