Mr. Suleyman Turgut Profile

Suleyman Turgut

Chief Revenue Officer at Luminit LLC

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Publications (2)

Proceedings Article | 22 May 1995 Paper

Direct measurement of optical constants of metals from a KrF excimer using polarization methods

Suleyman Turgut, Bruce Smith

Proceedings Volume 2439, (1995) https://doi.org/10.1117/12.209235

KEYWORDS: Metals, Optical testing, Excimers, Polarization, Excimer lasers, Optical components, Chromium, Gold, Aluminum, Silicon

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Proceedings Article | 17 May 1994 Paper

Phase-shift mask issues for 193-nm lithography

Bruce Smith, Suleyman Turgut

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175414

KEYWORDS: Photomasks, Lithography, Etching, Silica, Polymethylmethacrylate, Excimer lasers, Fabry–Perot interferometers, Projection systems, Phase shifts, Plasma etching

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