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Dr. Sybren J. Sijbrandij
at FEI Co
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Publications (1)
Proceedings Article | 6 December 2004 Paper
Gas flow modeling for focused ion beam (FIB) repair processes
Mohamed El-Morsi, Alexander Wei, Gregory Nellis, Roxann Engelstad, Sybren Sijbrandij, Diane Stewart, Hans Mulders
Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.570268
KEYWORDS: Ion beams, 3D modeling, Systems modeling, Process modeling, Photomask technology, Photomasks, Gases, Computational fluid dynamics, Computing systems, Statistical modeling
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