Dr. Tadakatsu Ohokubo
at National Institute for Materials Science
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2023 Presentation + Paper
Proceedings Volume 12421, 124210C (2023) https://doi.org/10.1117/12.2646233
KEYWORDS: Annealing, Gallium nitride, Magnesium, Gallium, Ions, Ion implantation, Silicon, Doppler effect, Solids, Chemical species

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