Mr. Taisaku Nakata Profile

Taisaku Nakata

at DNP Fine Electronics Sagamihara Co Ltd

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Publications (2)

Proceedings Article | 22 March 2008 Paper

Improvement of gate CD uniformity for 55 nm node logic devices

Takashi Murakami, Taisaku Nakata, Kensuke Taniguchi, Takayuki Uchiyama, Megumi Jyousaka, Masahide Tadokoro, Yoshitaka Konishi

Proceedings Volume 6922, 692210 (2008) https://doi.org/10.1117/12.771548

KEYWORDS: Critical dimension metrology, Etching, Lithography, Logic devices, Temperature metrology, Electronics, Reticles, Semiconducting wafers, Control systems, Chemical vapor deposition

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Proceedings Article | 3 April 2007 Paper

Evaluation of immersion lithography processes for 55-nm node logic devices

Taisaku Nakata, Teruhiko Kodama, Motofumi Komori, Naka Onoda, Takayuki Uchiyama

Proceedings Volume 6519, 65190I (2007) https://doi.org/10.1117/12.711108

KEYWORDS: Interfaces, Immersion lithography, Thin film coatings, Logic devices, Lithography, Liquids, Photoresist processing, Water, Optical lithography, Electronics

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