Prof. Takamaro Kikkawa Profile

Prof. Takamaro Kikkawa

Professor at Hiroshima Univ

SPIE Involvement:

Author

Publications (7)

SPIE Journal Paper | 13 June 2018

Portable impulse-radar detector for breast cancer: a pilot study

Shinsuke Sasada, Norio Masumoto, Hang Song, Keiko Kajitani, Akiko Emi, Takayuki Kadoya, Koji Arihiro, Takamaro Kikkawa, Morihito Okada

JMI, Vol. 5, Issue 02, 025502, (June 2018) https://doi.org/10.1117/12.10.1117/1.JMI.5.2.025502

KEYWORDS: Breast cancer, Tumors, Breast, Sensors, Prototyping, Antennas, Mammography, Domes, Breast imaging, Inspection

Read Abstract +

Proceedings Article | 17 November 2005 Paper

Fabrication of mesoporous silica for ultra-low-k interlayer dielectrics

Nobutoshi Fujii, Kazuo Kohmura, Takahiro Nakayama, Hirofumi Tanaka, Nobuhiro Hata, Yutaka Seino, Takamaro Kikkawa

Proceedings Volume 6002, 60020N (2005) https://doi.org/10.1117/12.633597

KEYWORDS: Silica, Dielectrics, Silicon, Cesium, Plasma treatment, Refractive index, Sol-gels, Carbon, Head-mounted displays, Transmission electron microscopy

Read Abstract +

Proceedings Article | 17 November 2005 Paper

Self-assembled porous silica/Cu damascene interconnects for 45nm node and beyond

T. Kikkawa, R. Yagi, S. Chikaki, M. Shimoyama, T. Ono, N. Fujii, K. Kohmura, H. Tanaka, T. Nakayama, A. Ishikawa, H. Matsuo, Y. Sonoda, N. Hata, Y. Seino, T. Yoshino, K. Kinoshita

Proceedings Volume 6002, 60020M (2005) https://doi.org/10.1117/12.632119

KEYWORDS: Silica, Copper, Dielectrics, Chemical mechanical planarization, Electroplating, Plasma etching, Silicon, Semiconducting wafers, Chemical reactions, Metals

Read Abstract +

Proceedings Article | 19 January 2005 Paper

Photosensitive porous low-k interlayer dielectric film

Shin-Ichiro Kuroki, Takamaro Kikkawa

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.570753

KEYWORDS: Silicon, Ultrasonics, Dielectrics, Lithography, Scanning electron microscopy, Photomicroscopy, Molecules, Ultraviolet radiation, Semiconducting wafers, Optical lithography

Read Abstract +

Proceedings Article | 19 January 2005 Paper

Self-assembled ultra-low-k porous silica films for 45-nm technology node

Takamaro Kikkawa, Y. Oku, K. Kohmura, N. Fujii, H. Tanaka, A. Ishikawa, H. Matsuo, Y. Sonoda, H. Miyoshi, T. Goto, N. Hata, Y. Seino, S. Takada, T. Yoshino, K. Kinoshita

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.571092

KEYWORDS: Silica, Dielectrics, Copper, Silicon, Oxides, Semiconducting wafers, Head-mounted displays, Bioalcohols, Back end of line, Transmission electron microscopy

Read Abstract +

Proceedings Article | 14 September 1994 Paper

Electromigration characteristics for Al-Ge-Cu

Kuniko Kikuta, Takamaro Kikkawa

Proceedings Volume 2334, (1994) https://doi.org/10.1117/12.186744

KEYWORDS: Germanium, Aluminum, Sputter deposition, Reliability, Silicon, Copper, Transmission electron microscopy, Annealing, Chemical species, Wet etching

Read Abstract +