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Takase Kei
at Univ of Hyogo
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Publications (1)
Proceedings Article | 11 May 2009 Paper
Actinic mask inspection using an extreme ultraviolet microscope
Kei Takase, Yoshito Kamaji, Takafumi Iguchi, Takashi Sugiyama, Toshiyuki Uno, Tetsuo Harada, Takeo Watanabe, Hiroo Kinoshita
Proceedings Volume 7379, 73792J (2009) https://doi.org/10.1117/12.824333
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, X-rays, Extreme ultraviolet lithography, Microscopes, X-ray optics, Sensors, Glasses, X-ray imaging
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