Dr. Takashi Yuito Profile

Dr. Takashi Yuito

Senior Manager at Nikon Advanced Manufacturing Inc.

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Author

Publications (3)

Proceedings Article | 23 March 2011 Paper

Mask enhancer technology with source mask optimization (SMO) for 2Xnm-node logic layout gate fabrication

Takashi Matsuda, Shigeo Irie, Tadami Shimizu, Takashi Yuito, Yasuko Tabata, Yuuji Nonami, Akio Misaka, Taichi Koizumi, Masaru Sasago

Proceedings Volume 7973, 797316 (2011) https://doi.org/10.1117/12.878727

KEYWORDS: Photomasks, Source mask optimization, Binary data, Halftones, Logic devices, Lithographic illumination, Phase shifts, Resolution enhancement technologies, Logic, Optical proximity correction

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Proceedings Article | 13 March 2010 Paper

Mask enhancer technology for sub-100nm pitch random logic layout contact hole fabrication

Takashi Yuito, Hiroshi Sakaue, Takashi Matsuda, Tadami Shimizu, Shigeo Irie, Fumio Iwamoto, Akio Misaka, Taichi Koizumi, Masaru Sasago

Proceedings Volume 7640, 76401B (2010) https://doi.org/10.1117/12.848025

KEYWORDS: Photomasks, Printing, Lithography, Image enhancement, Logic, Transmittance, Lab on a chip, Resolution enhancement technologies, Immersion lithography, Phase shifts

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Proceedings Article | 12 May 2005 Paper

Mask enhancer technology for 45-nm node contact hole fabrication

Takashi Yuito, Vincent Wiaux, Lieve Van Look, Geert Vandenberghe, Shigeo Irie, Takahiro Matsuo, Akio Misaka, Hisashi Watanabe, Masaru Sasago

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.598977

KEYWORDS: Thin films, Photomasks, Transmittance, Printing, Lithography, Halftones, Semiconducting wafers, Critical dimension metrology, Quartz, Resolution enhancement technologies

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