Mr. Takuya Kuroda Profile

Takuya Kuroda

at SCREEN Semiconductor Solutions Co Ltd

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Publications (2)

Proceedings Article | 1 April 2008 Paper

Demonstration of production readiness of an immersion lithography cell

Alberto Beccalli, Paolo Canestrari, Mark Goeke, Masashi Kanaoka, Helmut Kandraschow, Takuya Kuroda, Danilo De Simone, Paolo Piacentini, Miriam Padovani, Paolo Piazza, Alessandro Rossi

Proceedings Volume 6924, 69244X (2008) https://doi.org/10.1117/12.779150

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Immersion lithography, Lithography, Scanners, Silicon, Photoresist materials, Coating, Prototyping, Liquids

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Proceedings Article | 26 March 2008 Paper

Post develop stain defect reduction

Masahiko Harumoto, Takuya Kuroda, Minoru Sugiyama, Akihiro Hisai

Proceedings Volume 6923, 69233J (2008) https://doi.org/10.1117/12.772367

KEYWORDS: Photoresist processing, Semiconducting wafers, Scanning electron microscopy, Raman spectroscopy, Chemical elements, Image processing, Polarization, Information operations, Epitaxial lateral overgrowth, System identification

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