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Teddie Magbitang
Advisory Scientist at IBM Research - Almaden
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Publications (3)
Proceedings Article | 27 March 2017 Paper
Fundamentals of EUV resist-inorganic hardmask interactions
Proceedings Volume 10146, 1014607 (2017) https://doi.org/10.1117/12.2257933
KEYWORDS: Extreme ultraviolet, Etching, Image resolution, Line width roughness, Interfaces, Semiconducting wafers, Materials processing, Photoresist processing, Silicon, Head-mounted displays, Extreme ultraviolet lithography, Systems modeling, Oxides
Proceedings Article | 25 March 2016 Paper
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
HsinYu Tsai, Hiroyuki Miyazoe, Ankit Vora, Teddie Magbitang, Noel Arellano, Chi-Chun Liu, Michael Maher, William Durand, Simon Dawes, James Bucchignano, Lynne Gignac, Daniel Sanders, Eric Joseph, Matthew Colburn, C. Grant Willson, Christopher Ellison, Michael Guillorn
Proceedings Volume 9779, 977910 (2016) https://doi.org/10.1117/12.2219544
KEYWORDS: Line edge roughness, Line width roughness, Lithography, Polymers, Etching, Semiconductors, Manufacturing, Directed self assembly, Silicon, Plasma, Oxygen
Proceedings Article | 22 March 2007 Paper
Impact of curing kinetics and materials properties on imprint characteristics of resists for UV nano-imprint lithography
Frances Houle, Ann Fornof, Ratnam Sooriyakumaran, Hoa Truong, Dolores Miller, Martha Sanchez, Blake Davis, Teddie Magbitang, Robert Allen, Mark Hart, Geraud Dubois
Proceedings Volume 6519, 65191C (2007) https://doi.org/10.1117/12.712298
KEYWORDS: Ultraviolet radiation, Fluorine, Polymers, Glasses, Silicon, Polymerization, Data conversion, Scanning electron microscopy, Dielectrics, Materials processing
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