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Thomas Schneider
at Martin-Luther-Universität Halle-Wittenberg
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Publications (1)
Proceedings Article | 29 April 2016 Paper
Enhanced density of negative fixed charges in Al2O3 layers on Si through a subsequent deposition of TiO2
Thomas Schneider, Johannes Ziegler, Kai Kaufmann, Klemens Ilse, Alexander Sprafke, Ralf Wehrspohn
Proceedings Volume 9898, 989816 (2016) https://doi.org/10.1117/12.2239183
KEYWORDS: Titanium dioxide, Corundum, Silicon, Dielectrics, Atomic layer deposition, Crystals, Silicon solar cells, Quality measurement, Etching, Diffusion, Chlorine, Interfaces, Aluminum, Oxides
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