The phase-shifting algorithms are essential for a Fizeau interferometer to reconstruct the topography of the optical element’s surface or wavefront. There are differences between different algorithms for reconstruction results, especially for the suppression of noise. To acquire a more accurate Instrument transfer function (ITF) which reflects the axial spatial frequency response of a Fizeau interferometer, the algorithm transfer function which represents the characteristics of the calculation process in spatial frequency was proposed. In this paper, numerical simulations calculated and analyzed several transfer functions of the well-known phase-shifting algorithms. Then, the ITFs of a step plate with a height of 118 nm were measured with different algorithms by experiments and the results were analyzed. The simulations and experimental results indicate that the phase-shifting algorithm has an effect on the ITF measurement but it is not a key factor affecting the ITF measurement.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.