We show spectral combination of pulsed fiber laser systems for the first time to our knowledge. In this proof of principle
experiment, two directly modulated wavelength-stabilized tunable external cavity diode lasers (ECDL) serve as
independent seed sources. Each signal is amplified in a two stage ytterbium-doped fiber amplifier. The spatial overlap is
created using a transmission grating with a combining efficiency as high as 92 %. No beam quality degradation has been
observed for the combined beam compared to a single emission. An electronic delay is used to adjust the temporal
overlap of the pulses from the spatially separated amplifier setups. The presented approach offers an enormous scaling
potential of pulsed fiber laser systems, which are generally limited by nonlinear effects or fiber damage. We show that
the huge gain bandwidth of Yb-doped fiber amplifiers and the high diffraction efficiency of dielectric reflection gratings
in this wavelength range yield potential for a combination of up to 50 channels. For state-of-the-art ns-amplifier systems
> 100 MW of peak power, > 100 mJ of pulse energy and average powers of > 10 kW seem feasible.
Here, we propose a new mirror architecture which is solely based upon a monolithic dielectric micro-structured surface. Hence, the mirror device, which consists of a possibly mono-crystalline bulk material, can in principle simultaneously provide perfect reflectivity and lowest mechanical loss. By specifically structuring the monolithic surface, resulting in T-shaped ridges of a subwavelength grating, a resonant behavior of light coupling can be realized, leading to theoretically 100% reflectivity.
A new approach for the realization of highly dispersive dielectric transmission gratings is presented. By covering
conventional transmission gratings with a plane substrate a complete suppression of any reflection losses and, thus,
100% diffraction efficiency can be achieved. Theoretical design considerations, a physical investigation of the
diffraction as well as very promising experimental results are shown.
KEYWORDS: Photomasks, Diffraction, Holography, Near field, Scanning electron microscopy, Polarization, Electron beam lithography, Wave propagation, Lithography, Free space
We present a technique for the fabrication of small period structures using a near field holography setup. Using a two-dimensionally structured phase mask, the creation of two-dimensional hole or dot arrays was possible with one single exposure step. In order to get a high contrast interference pattern, the mask parameters were optimized by rigorous calculation to achieve equal transmission efficiency in the respective diffraction orders. The mask generation was done by electron beam lithography and ion beam etching. We have made exposures with two different setups. The first setup is an exposure with normal incidence, where the interference of the four first diffraction orders is used. The second setup uses the zeroth and first diffraction order interference of a conical incident beam.
For gaining a deeper understanding of the diffraction processes that take place in deep dielectric transmission gratings, a phenomenological explanation has been developed on the basis of a modal field, which propagates vertically through the grating region. The excitation of these modes by the incident wave, their propagation constants and how they couple to the diffraction orders determines the diffraction efficiency of the transmitted orders. The explicit modal analysis discloses the description of the highly efficient diffraction for polarized or unpolarized light by a very simple interference mechanism, which will be the subject of this paper.
Nanowire composites are considered as a challenge in design and making of left-handed materials. We established several arrangements on silica glass substrate and show transmission measurements on fields of single nanowires. The results can be interpreted in such a way that the incident electromagnetic wave effectively couple to plasmon modes and lead to negative dielectric permittivity in a particular infrared spectrum. These effects depend on the structure, the topological and geometrical properties of the nanowires and their orientation relative to the wave. Transmission measurements with fields of parallel pairs of nanowires on both sides of the isolating show results that can be well interpreted as negative magnetic permeability and negative dielectric permittivity in the infrared spectra. This arrangement of nanowire pairs can act as a so- called left-handed metamaterial with a negative index of refraction in the infrared and visible spectral ranges.
By combining electron beam lithography with coating processes, very shallow gratings with diffraction efficiencies between 0.02% and 7% have been realized. Advantages and disadvantages of different layout concepts for such gratings, their fabrication regime and measurements of their scattering will be discussed. The application of such gratings as coupling components to a reflective Fabry-Perot cavity resulted in a finesse of more than 400.
Micromachining applications require high pulse energy (>1μJ) short pulse (<1ps) laser systems at high repetition rates. Rare-earth doped fibers are attractive to generate these target values by the amplification of ultrafast femtosecond seed sources. Two favored techniques have been used: the chirped pulse amplification (CPA) scheme where the pulses are stretched in the time domain to reduce nonlinearity in the amplifier stage and the parabolic pulse amplification scheme where the combined effect of nonlinearity, normal dispersion and gain in the fiber generate linearly chirped parabolic shaped pulses. Both approaches can be scaled to higher power by reducing the nonlinearity in the amplifiers. To achieve this, we discuss novel photonic crystal fiber designs which allow for larger single-mode core diameter and reduced absorption length and therefore reduced nonlinearity. The so generated high average power of >100 W at repetition rate up to several tens of MHz cannot be compressed by gold gratings to femtosecond pulse duration due to thermal heating. We focus on the development of dielectric gratings in fused silica which can handle this power levels due to their high damage threshold. Two kinds of gratings are discussed. Firstly, the transmission gratings with a period of 800 nm were designed to possess 96% diffraction efficiency over a spectral range from 1.03μm to 1.09μm. The fabrication of the rectangular groove profile was done using electron beam lithography and reactive ion beam etching into the fused silica substrate. The measured diffraction efficiency was 96.5% @ 1060nm. Secondly, dielectric reflection gratings, which consist of a dielectric grating on top of a high-reflective layerstack, can theoretically exhibit a diffraction efficiency of even higher than 99%. To achieve this we chose a period of 1060nm. The fabrication was done similar to the transmission gratings, though a HR-coated substrate had to be used instead of the simple fused substrate. The fabricated gratings show a diffraction efficiency of 99.6%. Both are applied to the discussed high power fiber amplifier stages to generate linearly polarized femtosecond pulses at ~100 W average power with a repetition rate of 80 MHz.
Antireflection coatings are studied for increasing the transmitted efficiency of diffractive optical elements. Numerical simulations of different beam-splitters show that noticeable increase in efficiency can be reached with a particular optimized structure.
Many industrial and scientific applications require high power ultrashort laser pulses, so amplification of pulses is necessary. To avoid optical damage or nonlinear effects in the amplifier setup, the pulses are stretched before amplification and recompressed afterwards. One possibility for the efficient stretching and recompression is to apply highly efficient diffraction gratings, whereby dielectric gratings and especially dielectric transmission gratings feature a high damage threshold. If the incident pulses are not linear polarized, the polarization sensitive diffraction efficiency of the gratings mostly results in a significantly reduced pulse energy. To overcome this problem we developed highly efficient polarization independent gratings and present a theoretical and experimental study on the design and fabrication of highly dispersive transmission gratings in fused silica, that exhibit a high diffraction efficiency for TE and TM-polarized illumination as well. The dependence of the diffraction efficiency on the grating parameters is discussed for both polarization directions. One of the theoretical designs shows a diffraction efficiency exceeding 97%
for unpolarized illumination. The fabrication of those gratings has been done by electron beam lithography and reactive ion beam etching, whereby the diffraction efficiency was maximized by a special trimming process. The theoretical considerations are confirmed by the fabricated samples.
Today’s technologies available for the fabrication of micro structured optical elements are well developed for defined classes of structures. Techniques for very complex optical functions or for combinations of optical functions together with others are more or less in the level of research or labs. A promising approach for complex grating fabrication is the use of optical near field holography (NFH) and e-beam writing for unification of the advantages. The paper wants to show the potential of both techniques itself as well as the potential that arises from their teamwork. The paper demonstrates one and two dimensional gratings, chirped and unidirectional gratings fabricated by NFH using e-beam written masks. It shows also possibilities for the fabrication of gratings on binary, multilevel and continuous optical profiles.
Several applications in science and industry require a precise measurement of the polarization of the incident light, e.g. the online characterization of textile-fiber birefringency in spinning machines. A promising concept to realize these polarimeters is based on structured polarizers that consist of three polarizing metal stripe gratings, whose spatial orientations are tilted against each other with an angle of 60deg. With such an approach the state of polarization can be determined with a very small device without any moving parts. Here we report on the fabrication of a micro optical
polarimeter based on three polarizing metal stripe gratings with a grating period of 300nm and a size of 0.3 mm x 0.3 mm each. To achieve the necessary high aspect ratio we combined electron-beam direct writing with dry etching and metal coating under oblique incidence. The measured polarization contrast of the fabricated micropolarizers is more than 300:1 over a large spectral range (wavelength between 450nm and 1000nm), moreover they have a contrast of even more than 1000:1 if light with a wavelength between 500nm and 600nm is used. Thus, they are well suited for microsensors to detect birefringency.
In the last years it has been shown that the gray tone lithography (with HEBS-glass masks) is a suitable technology for fabricating arbitrary continuous surface profiles. However, the resolution of this technology is limited and is in the range of some micrometers dependent on the electron energy used for darkening the HEBS glass mask. To overcome this drawback, we suggest to apply two subsequent lithographic steps on the photoresist layer without a second coating. Non-standard gray tone lithography will be used in a first step for fabricating a pre-form and the second lithographic step which can provide the resolution demanded will correct for the residual deviations.
This is possible with an alternative method of gray tone lithography which makes use of the absorption and bleaching of the photoresist. Exposure with a sufficiently short time leaves a bottom part of the resist layer unexposed and develop-ment stops at its face. Thus, the remaining resist profile can be exposed in a second lithographic step without a new re-sist coating.
With this method it will be possible to fabricate sub-wavelength structures, e.g. for antireflection, on top of arbitrary continuous surface profiles. Moreover, this method can be used for the fabrication of deep profiles by repeated applica-tion of the first lithographic step.
In the paper we will discuss the problems of accuracy, resolution and profile depth of this method and present results of optical elements fabricated by this technology.
To realize a well defined binary grating (for grating originals as well as grating masks), it is helpful to use a rectangular resist profile because of the importance of the fill factor. This can be achieved easier by e-beam writing than by holography. On the opposite, well-known handicaps of e-beam writing are large writing times and grating ghosts (caused e.g. by stitching errors). We fabricated chromium grating masks (period 500 nm, size 100 mm x 100 mm) by an extremely fast and specialized e-beam direct writing process. The typical and critical parameters, like fill factor and wave front, were locally measured in the whole grating area. The paper will show the method of e-beam writing and the results of lateral grating quality. The remaining errors are separated in problems caused by the writing process and in problems related to resist technology and etching process.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.