Dr. Tsukasa Watanabe Profile

Dr. Tsukasa Watanabe

at AIST

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Publications (3)

Proceedings Article | 10 August 2023 Presentation + Paper

Calibration system for photomask roundness based on a precision rotary table

Mariko Kajima, Kentaro Sugawara, Yasuaki Hori, Tsukasa Watanabe

Proceedings Volume 12619, 1261909 (2023) https://doi.org/10.1117/12.2673712

KEYWORDS: Photomasks, Calibration, Microscopes, Interferometers, Edge detection, Ultraviolet radiation, Standards development, Imaging systems, CCD image sensors, Beam diameter

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Proceedings Article | 20 November 2003 Paper

Automatic high-precision calibration system for angle encoder (II)

Tsukasa Watanabe, Hiroyuki Fujimoto, Kan Nakayama, Tadashi Masuda, Makoto Kajitani

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.506473

KEYWORDS: Computer programming, Calibration, Head, Bismuth, Electronic design automation, Quartz, Oscillators, Clocks, Phase shifts, Precision calibration

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Proceedings Article | 22 October 2001 Paper

Automatic high-precision calibration system for angle encoder

Tsukasa Watanabe, Hiroyuki Fujimoto, Kan Nakayama, Tadashi Masuda, Makoto Kajitani

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445630

KEYWORDS: Computer programming, Calibration, Electronic design automation, Standards development, Head, Manufacturing, Clocks, Control systems, Precision calibration, Phase shifts

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