Dr. Uwe D. Zeitner
at Fraunhofer-Institut für Angewandte Optik und Feinmechanik
SPIE Involvement:
Conference Program Committee | Author
Publications (81)

PROCEEDINGS ARTICLE | July 10, 2018
Proc. SPIE. 10706, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III
KEYWORDS: Near infrared, Lithography, Electron beam lithography, Diffraction, Optical design, Manufacturing, Photomasks, Inverse optics, Dielectric polarization, Diffraction gratings

PROCEEDINGS ARTICLE | June 15, 2018
Proc. SPIE. 10692, Optical Fabrication, Testing, and Metrology VI
KEYWORDS: Diffraction, Optical design, Scattering, Spectroscopy, Light scattering, Line edge roughness, Stray light, Diffraction gratings

PROCEEDINGS ARTICLE | May 28, 2018
Proc. SPIE. 10693, Illumination Optics V
KEYWORDS: Microlens array, Lens design, Diffusers, Beam shaping, Beam homogenizers, Grayscale lithography

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Scattering, Scanners, Diffusers, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

PROCEEDINGS ARTICLE | November 20, 2017
Proc. SPIE. 10565, International Conference on Space Optics — ICSO 2010
KEYWORDS: Diffraction, Modulation, Silica, Etching, Spectroscopy, Chromium, Charge-coupled devices, Stray light, Binary data, Diffraction gratings

PROCEEDINGS ARTICLE | September 25, 2017
Proc. SPIE. 10562, International Conference on Space Optics — ICSO 2016
KEYWORDS: Near infrared, Diffraction, Optical design, Reflection, Spectroscopy, Dielectrics, Astronomical imaging, Optical mounts, Dielectric polarization, Diffraction gratings

Showing 5 of 81 publications
Conference Committee Involvement (10)
Optical Microlithography XXXII
24 February 2019 | San Jose, California, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Laser Beam Shaping XII
21 August 2011 | San Diego, California, United States
Laser Beam Shaping XI
2 August 2010 | San Diego, California, United States
Showing 5 of 10 published special sections
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