Dr. Venkatraman Iyer Profile

Dr. Venkatraman Iyer

Senior Director at KLA Corp

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Publications (2)

Proceedings Article | 17 October 2008 Paper

Results from the KLA-Tencor TeraScanXR reticle inspection tool

Aditya Dayal, Bo Mu, Venkat Iyer, Phillip Lim, Arosha Goonesekera, Bill Broadbent

Proceedings Volume 7122, 71223G (2008) https://doi.org/10.1117/12.801831

KEYWORDS: Inspection, Reticles, Line edge roughness, Signal to noise ratio, Sensors, Detection and tracking algorithms, Spatial frequencies, Modulation transfer functions, Image processing, Defect detection

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Proceedings Article | 9 July 1998 Paper

Enhancing back-illuminated performance of astronomical CCDs

Michael Lesser, Venkatraman Iyer

Proceedings Volume 3355, (1998) https://doi.org/10.1117/12.316776

KEYWORDS: Charge-coupled devices, Quantum efficiency, Metals, Hydrogen, Coating, Silicon, Platinum, Back illuminated sensors, Oxides, Astronomy

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