A microplasma is defined as a plasma (i.e., a mixture of ions and electrons) with one critical dimension (e.g., depth, or length, or radius) in the mm or the sub-mm (m) range. Over the years, we designed and fabricated a variety of microplasmas using technologies ranging from those borrowed from semiconductor fabrication on crystalline-Silicon substrates to 3D printing on polymeric substrates. In this presentation, the determination of excitation temperatures (Texc) is described. Determination of Texc is important because it is affecting detection limits and is described here.
Microplasmas have been defined (somewhat arbitrarily) as those with one critical dimension (e.g., depth, height or radius) in the micrometer range. Although lab-scale plasmas consume ~20 Lit/min of costly inert gas and require 1-2 kW of electrical power, microplasmas consume only 0.250 mL/min of gas and can be operated from a rechargeable battery. Over time, we developed, evaluated and characterized numerous microplasmas (including those we developed on polymeric substrates). Their detection limits gradually improved after each design cycle. To demonstrate analytical applicability and utility, we show that a microplasma coupled to a fiber-optic spectrometer has the potential to be used for the determination of Cr (Chromim). We also compare optical emission background spectra obtained using different inert gases.
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