Mr. Viatcheslav V. Nesterenko Profile

Viatcheslav V. Nesterenko

at Fraunhofer-IOF

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Author

Publications (3)

Proceedings Article | 19 May 2011 Paper

Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 8077, 80770X (2011) https://doi.org/10.1117/12.891803

KEYWORDS: Extreme ultraviolet lithography, Carbon, Extreme ultraviolet, Contamination, Reflectivity, Mirrors, EUV optics, Gases, Synchrotron radiation, Wafer-level optics

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Proceedings Article | 26 March 2011 Paper

Optics contamination studies in support of high-throughput EUV lithography tools

S. Hill, N. Faradzhev, L. Richter, S. Grantham, C. Tarrio, T. Lucatorto, S. Yulin, M. Schürmann, V. Nesterenko, T. Feigl

Proceedings Volume 7969, 79690M (2011) https://doi.org/10.1117/12.879852

KEYWORDS: Contamination, Extreme ultraviolet lithography, Extreme ultraviolet, EUV optics, Carbon, Molecules, Synchrotrons, Mirrors, Ruthenium, Spectroscopic ellipsometry

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Proceedings Article | 23 March 2010 Paper

Multi-technique study of carbon contamination and cleaning of Mo/Si mirrors exposed to pulsed EUV radiation

Mark Schürmann, Sergiy Yulin, Viatcheslav Nesterenko, Torsten Feigl, Norbert Kaiser, Boris Tkachenko, Max Schürmann

Proceedings Volume 7636, 76361P (2010) https://doi.org/10.1117/12.848197

KEYWORDS: Carbon, Extreme ultraviolet lithography, Contamination, Reflectivity, Extreme ultraviolet, Mirrors, Silicon, Bioalcohols, X-rays, Oxidation

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