Dr. Vijayakumar C. Venugopal Profile

Dr. Vijayakumar C. Venugopal

Process Engineer at Lam Research Corp

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Author

Publications (7)

Proceedings Article | 4 November 2003 Paper

Manufacturability considerations in designing optical monitoring methods for control of plasma etch processes

Vijayakumar Venugopal, Andrew Perry, Kim Wallace, David Cooperberg

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.506671

KEYWORDS: Etching, Semiconducting wafers, Plasma etching, Plasma, Reflectivity, Oxides, Optics manufacturing, In situ metrology, Wafer-level optics, Process control

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Proceedings Article | 11 November 2002 Paper

Reflectometry-based approaches for in-situ monitoring of etch depths in plasma etching processes

Vijayakumar Venugopal, Andrew Perry

Proceedings Volume 4779, (2002) https://doi.org/10.1117/12.451735

KEYWORDS: Etching, Semiconducting wafers, Plasma etching, Reflectivity, Plasma, Process control, Interferometry, Wafer-level optics, Thin films, Ellipsometry

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Proceedings Article | 24 June 2002 Paper

Towards graded-index planar waveguides using 2D sculptured thin films

Vijayakumar Venugopal, Akhlesh Lakhtakia

Proceedings Volume 4806, (2002) https://doi.org/10.1117/12.472978

KEYWORDS: Waveguides, Thin films, Wave propagation, Dielectrics, Planar waveguides, Dispersion, Free space, Differential equations, Gradient-index optics, Scanning electron microscopy

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Proceedings Article | 30 June 2000 Paper

Absorption by nonaxially excited layers of dielectric thin film helicoidal bianisotropic mediums

Vijayakumar Venugopal, Akhlesh Lakhtakia

Proceedings Volume 4097, (2000) https://doi.org/10.1117/12.390581

KEYWORDS: Absorption, Reflectivity, Thin films, Dichroic materials, Dielectrics, Polarization, Free space, Linear filtering, Electromagnetism, Adaptive optics

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Proceedings Article | 30 June 1999 Paper

Evolution of sculptured thin films

Russell Messier, Paul Sunal, Vijayakumar Venugopal

Proceedings Volume 3790, (1999) https://doi.org/10.1117/12.351244

KEYWORDS: Thin films, Anisotropy, Ions, Contrast transfer function, Sputter deposition, Chemical species, Scanning electron microscopy, Electron microscopes, Information operations, Molecular aggregates

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Proceedings Article | 30 June 1999 Paper

Homogenization and optical response properties of sculptured thin films

Akhlesh Lakhtakia, Paul Sunal, Vijayakumar Venugopal, Elif Ertekin

Proceedings Volume 3790, (1999) https://doi.org/10.1117/12.351264

KEYWORDS: Homogenization, Thin films, Dielectrics, Electromagnetism, Solids, Lawrencium, Materials science, Mechanics, Optical properties, Anisotropy

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Proceedings Article | 30 June 1999 Paper

Optical and electronic applications of sculptured thin films

Vijayakumar Venugopal, Akhlesh Lakhtakia, Elif Ertekin

Proceedings Volume 3790, (1999) https://doi.org/10.1117/12.351252

KEYWORDS: Linear filtering, Optical filters, Gas sensors, Thin films, Optical coatings, Reflectivity, Dielectrics, Sensors, Electronic filtering, Tunable filters

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Showing 5 of 7 publications

Conference Committee Involvement (2)

Complex Mediums V: Light and Complexity

4 August 2004 | Denver, Colorado, United States

Complex Mediums IV: Beyond Linear Isotropic Dielectrics

4 August 2003 | San Diego, California, United States

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