Mr. Weizhong Huang Profile

Weizhong Huang

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Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Functional underlayers, surface priming, and multilayer stacks to improve dose and adhesion of EUV photoresists

Roberto Fallica, Lander Verstraete, Weizhong Huang, Mihir Gupta, Danilo De Simone, Si (Elly) Li, Daniel Sweat, Douglas Guerrero, Kodai Kato

Proceedings Volume 12957, 1295712 (2024) https://doi.org/10.1117/12.3009801

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Adhesion, Etching, Semiconducting wafers, Extreme ultraviolet, Silicon, Line width roughness, Chemically amplified resists, Amorphous carbon

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Proceedings Article | 21 November 2023 Presentation + Paper

Functional underlayers for dose reduction and collapse mitigation in EUV lithography: a factorial analysis

Roberto Fallica, Weizhong Huang, Hyo Seon Suh, Danilo De Simone, Douglas Guerrero, Kodai Kato

Proceedings Volume 12750, 127500I (2023) https://doi.org/10.1117/12.2687546

KEYWORDS: Factor analysis, Extreme ultraviolet lithography, Surface roughness, Photoresist materials, Statistical analysis, Line width roughness, Extreme ultraviolet, Metal oxides, Lithography

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