Mr. Wen Jun Ling Profile

Wen Jun Ling

at Semiconductor Manufacturing International Corp

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Publications (2)

Proceedings Article | 26 September 2019 Paper

Lithography printability review: an application on advanced photomask production for enhancing mask yield and cycle time

Wenjun Ling, Xuefei Qin, Dejian Li, Fen Xue, Jie Wang, Cong Lu, Mingjing Tian, Ming Chen, Vikram Tolani, Gregg Inderhees, Alexander Tan, Suo Li, Xiaodi Liu

Proceedings Volume 11148, 1114812 (2019) https://doi.org/10.1117/12.2536494

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Lithography, Mask making, Optical proximity correction, Manufacturing, Defect inspection, Scanners, Computer simulations

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Proceedings Article | 3 October 2018 Paper

Pattern edge roughness study on OMOG mask repair

Xuefei Qin, Jie Wang, Irene Shi, Fen Xue, Alan Li, Wenjun Ling, Linna Cong

Proceedings Volume 10810, 108100Z (2018) https://doi.org/10.1117/12.2501753

KEYWORDS: Plasma, Etching, Edge roughness, Oxides, Photomasks, Oxygen, Distortion, Plasma etching

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