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Wing Wai Chung
at A*STAR Institute of Microelectronics
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Publications (3)
Proceedings Article | 12 March 2024 Presentation + Paper
Scandium-doped aluminum nitride photonic integration platform
Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. Ng, Lennon Y. Lee, Xianshu Luo
Proceedings Volume 12889, 128890D (2024) https://doi.org/10.1117/12.3004598
KEYWORDS: Waveguides, Aluminum nitride, Microrings, Photonic integrated circuits, Microresonators, Scandium, Harmonic generation, Optical properties, Semiconducting wafers, Resonators
Proceedings Article | 12 March 2024 Presentation + Paper
SF6 mixed in N2 gas sensing responses from CMOS-compatible AlN and ScAlN pyroelectric detectors
Proceedings Volume 12899, 128990J (2024) https://doi.org/10.1117/12.3002138
KEYWORDS: Pyroelectric detectors, Gas sensors, Sensors, Aluminum nitride, Signal detection, Pyroelectricity, Gases, Mid infrared, CMOS sensors
Proceedings Article | 5 March 2021 Presentation + Paper
CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN
Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707
KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography
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