Dr. Wolfgang Fichtner Profile

Dr. Wolfgang Fichtner

Senior Vice President/General Manager at ETH Zurich

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 3 June 2010 Paper

A novel Monte Carlo simulation code for linewidth measurement in critical dimension scanning electron microscopy

Alexander Koschik, Mauro Ciappa, Stephan Holzer, Maurizio Dapor, Wolfgang Fichtner

Proceedings Volume 7729, 77290X (2010) https://doi.org/10.1117/12.853804

KEYWORDS: Silicon, Line scan image sensors, Monte Carlo methods, Polymethylmethacrylate, Scattering, Physics, Scanning electron microscopy, Selenium, Particles, Dielectrics

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SPIE Journal Paper | 1 April 2010

Monte Carlo modeling in the low-energy domain of the secondary electron emission of polymethylmethacrylate for critical-dimension scanning electron microscopy

Maurizio Dapor, Mauro Ciappa, Wolfgang Fichtner

JM3, Vol. 9, Issue 02, 023001, (April 2010) https://doi.org/10.1117/12.10.1117/1.3373517

KEYWORDS: Monte Carlo methods, Polymethylmethacrylate, Scattering, Molecules, Phonons, Polarons, Scanning electron microscopy, Solids, Molecular interactions, Dielectrics

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Proceedings Article | 28 April 2005 Paper

Device simulation and statistical analysis in industrial laser design

Andreas Witzig, Bernd Witzigmann, Sathya Krishnamurthy, Gerhard Braun, Michael Pfeiffer, Wei-Choon Ng, Mark Johnson, Wolfgang Fichtner

Proceedings Volume 5722, (2005) https://doi.org/10.1117/12.590161

KEYWORDS: Systems modeling, Device simulation, Data modeling, 3D modeling, Statistical analysis, Laser development, Optoelectronic devices, Computer aided design, Manufacturing, Optoelectronics

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Proceedings Article | 25 July 2003 Paper

Technology CAD-based design of vertical-cavity surface-emitting lasers

Matthias Streiff, Andreas Witzig, Michael Pfeiffer, Lutz Schneider, Wolfgang Fichtner

Proceedings Volume 4986, (2003) https://doi.org/10.1117/12.474323

KEYWORDS: Vertical cavity surface emitting lasers, Dielectrics, Quantum wells, Computer aided design, Electrons, Instrument modeling, Mirrors, 3D modeling, Systems modeling, Oxides

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Proceedings Article | 25 July 2003 Paper

Coupled electro-thermo-optical simulation of a multisection DBR laser

Lutz Schneider, Andreas Witzig, Michael Pfeiffer, Matthias Streiff, Wolfgang Fichtner

Proceedings Volume 4986, (2003) https://doi.org/10.1117/12.474324

KEYWORDS: Optical simulations, Tunable lasers, 3D modeling, Waveguides, Computer simulations, Integrated optics, Electrons, Cladding, Mirrors, Semiconductor lasers

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Proceedings Article | 9 July 2001 Paper

Time-domain Green's functions of realistic VCSEL cavities

Andreas Witzig, Matthias Streiff, Wolfgang Fichtner

Proceedings Volume 4283, (2001) https://doi.org/10.1117/12.432556

KEYWORDS: Vertical cavity surface emitting lasers, Finite-difference time-domain method, Optical resonators, Computer simulations, Wave propagation, Mirrors, Optical simulations, Device simulation, Maxwell's equations, Electromagnetism

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Showing 5 of 6 publications

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