Dr. Woo Jin Bae Profile

Dr. Woo Jin Bae

at Cornell Univ

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Publications (3)

Proceedings Article | 26 March 2010 Paper

Development of an inorganic photoresist for DUV, EUV, and electron beam imaging

Markos Trikeriotis, Woo Jin Bae, Evan Schwartz, Marie Krysak, Neal Lafferty, Peng Xie, Bruce Smith, Paul Zimmerman, Christopher Ober, Emmanuel Giannelis

Proceedings Volume 7639, 76390E (2010) https://doi.org/10.1117/12.846672

KEYWORDS: Nanoparticles, Photoresist materials, Electron beam lithography, Etching, Hafnium, Resistance, Oxides, Photoresist developing, Deep ultraviolet, Refractive index

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Proceedings Article | 1 April 2009 Paper

High-index nanocomposite photoresist for 193-nm lithography

Woo Jin Bae, Makros Trikeriotis, Robert Rodriguez, Michael Zettel, Emil Piscani, Christopher Ober, Emmanuel Giannelis, Paul Zimmerman

Proceedings Volume 7273, 727326 (2009) https://doi.org/10.1117/12.814154

KEYWORDS: Nanoparticles, Photoresist materials, Refractive index, Water, Ultraviolet radiation, Nanocomposites, Lithography, Immersion lithography, Semiconducting wafers, Absorption

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Proceedings Article | 1 April 2009 Paper

High refractive index nanoparticle fluids for 193-nm immersion lithography

Markos Trikeriotis, Robert Rodriguez, Michael Zettel, Aristeidis Bakandritsos, Woo Jin Bae, Paul Zimmerman, Christopher Ober, Emmanuel Giannelis

Proceedings Volume 7273, 72732A (2009) https://doi.org/10.1117/12.814408

KEYWORDS: Refractive index, Nanoparticles, Water, Immersion lithography, Hafnium, Particles, Absorption, Oxides, Fluid dynamics, Dynamic light scattering

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