Dr. Jason Li Profile

Dr. Jason Li

at ASML

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 March 2016 Paper

Layer aware source mask target optimization

Ao Chen, Yee Mei Foong, Jessy Schramm, Liang Ji, Stephen Hsu, James Guerrero, Xiaoyang Li, Joe Shaw, Joe Wang

Proceedings Volume 9780, 97801A (2016) https://doi.org/10.1117/12.2219864

KEYWORDS: Source mask optimization, Lithography, Metals, Photomasks, Etching, Resolution enhancement technologies, Logic, Lithographic illumination, Optical lithography, Computational lithography, Critical dimension metrology, Sensors, Photovoltaics, Optical proximity correction, Electroluminescence

Read Abstract +

Proceedings Article | 23 March 2011 Paper

Full-chip source and mask optimization

Min-Chun Tsai, Stephen Hsu, Luoqi Chen, Yen-Wen Lu, Jiangwei Li, Frank Chen, Hong Chen, Jun Tao, Been-Der Chen, Hanying Feng, William Wong, Wei Yuan, Xiaoyang Li, Zhipan Li, Liang Li, Russell Dover, Hua-yu Liu, Jim Koonmen

Proceedings Volume 7973, 79730A (2011) https://doi.org/10.1117/12.881633

KEYWORDS: Source mask optimization, Photomasks, SRAF, Optical proximity correction, Lithography, Manufacturing, Logic, Electroluminescence, Inspection, Lithium

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years