Dr. Xin-Yu Bao Profile

Dr. Xin-Yu Bao

Senior Process Engineer at Applied Materials Inc

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Publications (6)

Proceedings Article | 26 March 2013 Paper

Design strategy of small topographical guiding templates for sub-15nm integrated circuits contact hole patterns using block copolymer directed self assembly

He Yi, Xin-Yu Bao, Richard Tiberio, H.-S. Philip Wong

Proceedings Volume 8680, 868010 (2013) https://doi.org/10.1117/12.2011263

KEYWORDS: Optical lithography, Integrated circuits, Electron beam lithography, Integrated circuit design, Lithography, Transmission electron microscopy, Directed self assembly, Logic, Error analysis, Neodymium

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Proceedings Article | 21 March 2012 Paper

Contact-hole patterning for random logic circuits using block copolymer directed self-assembly

He Yi, Xin-Yu Bao, Jie Zhang, Richard Tiberio, James Conway, Li-Wen Chang, Subhasish Mitra, H.-S. Philip Wong

Proceedings Volume 8323, 83230W (2012) https://doi.org/10.1117/12.912804

KEYWORDS: Optical lithography, Logic, Electron beam lithography, Transistors, Scanning electron microscopy, Binary data, Lithography, Very large scale integration, Silicon, Directed self assembly

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Proceedings Article | 6 March 2012 Open Access

Block copolymer directed self-assembly enables sublithographic patterning for device fabrication

H.-S. Philip Wong, Chris Bencher, He Yi, Xin-Yu Bao, Li-Wen Chang

Proceedings Volume 8323, 832303 (2012) https://doi.org/10.1117/12.918312

KEYWORDS: Optical lithography, Lithography, Semiconductors, Scanning electron microscopy, Baryon acoustic oscillations, Semiconductor manufacturing, Logic, Double patterning technology, Photomasks, Directed self assembly

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Proceedings Article | 23 February 2012 Paper

GaAs thin film nanostructure arrays for III-V solar cell applications

Dong Liang, Yangsen Kang, Yijie Huo, Ken Xinze Wang, Anjia Gu, Meiyueh Tan, Zongfu Yu, Shuang Li, Jieyang Jia, Xinyu Bao, Shuang Wang, Yan Yao, Shanhui Fan, Yi Cui, James Harris

Proceedings Volume 8269, 82692M (2012) https://doi.org/10.1117/12.909743

KEYWORDS: Nanostructures, Absorption, Thin films, Gallium arsenide, Solar cells, Nanostructured thin films, Thin film solar cells, Nanostructuring, Optical spheres, Light wave propagation

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Proceedings Article | 23 March 2011 Paper

Mandrel-based patterning: density multiplication techniques for 15nm nodes

Chris Bencher, Huixiong Dai, Liyan Miao, Yongmei Chen, Ping Xu, Yijian Chen, Shiany Oemardani, Jason Sweis, Vincent Wiaux, Jan Hermans, Li-Wen Chang, Xinyu Bao, He Yi, H.-S. Philip Wong

Proceedings Volume 7973, 79730K (2011) https://doi.org/10.1117/12.881679

KEYWORDS: Optical lithography, Photomasks, Line width roughness, Lithography, Semiconducting wafers, Back end of line, Double patterning technology, Logic, Extreme ultraviolet, Directed self assembly

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Showing 5 of 6 publications

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