The research of CO2 laser smoothing fused silica to achieve smooth surface was investigated by simulations and experiments. Micro-flow smoothing of fused silica was numerically simulated. In the experiments, the influence of processing parameters, such as P (laser power), v (scanning velocity) and d (scanning path pitch) were taken into account on surface roughness (Ra) after laser irradiation. The results show that the roughness is rapidly reduced from 183.6nm to 14.27nm under P=35W, v=0.2mm/s, d=1.0mm, and thus the smooth surface is obtained. On the other hand, the raster structure will appear on the surface at inappropriate parameters (P=30W or v=0.5mm/s or d=2.0mm). The surface roughness highly influenced by raster structure ranges from ~40nm to ~140nm, 140.9nm for P=30W, 71.6nm for v=0.5mm/s, 41.3nm for d=2.0mm.
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