The all-thin-film inorganic electrochromic device (ECD) with LiNbO3 as the ion conductor layer was prepared. The ECD was fabricated monolithically in a same vacuum chamber layer by layer using DC reactive sputtering for WO3, NiOx and ITO, and radio frequency (RF) sputtering for LiNbO3. The properties and performance of WO3 thin film and the ECD were studied through X-ray diffraction (XRD), scanning electron microscopy (SEM), and ultraviolet-visible spectrometry. WO3 thin film has more than 60% optical modulation with porous amorphous structure. The visible transmittance modulation of the ECD is more than 65%, and the response time of coloring and bleaching are 45 s and 25 s, respectively.
An intrinsic optical fiber hydrogen sensor based on polarization-maintaining photonic crystal fiber (PM-PCF) Sagnac interferometer was proposed. The facing target sputtering technique with special Pd/Ag plate target structure was developed to deposit Pd/Ag composite film on PM-PCF. The characteristic of Pd/Ag film was measured and analyzed. An experimental setup for hydrogen sensing was built. The wavelength at different hydrogen concentration and the temperature interference were tested. The results showed the sensitivity was higher at low concentration range and good repeatability was obtained within measuring range of 4%. And the temperature affect was weak with special PM-PCF.
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